Structural and electrical properties of Sb2O3 thin films

The thin films Sb2O3 are deposited under vacuum on glass substrates by thermal evaporation technique. The structural characteristics of these films were studied by combined X-ray diffraction and planar view scanning electron microscopy. Electrical properties of vacuum evaporated Sb2O3 thin films have been studied. The electrical conductivity was carried out at different temperatures in the range 289-443 K. The electrical conduction was discussed in terms of known transport mechanisms. The thermal activation energy of the films with thickness of 0.34 mu m is determined by the temperature dependence of electrical conductivity.