Growth, structure and spectroscopic characterization of the Mn-doped GaN thin films

被引：0
|
作者：
Bondar, V [1 ]
Kukharsky, I [1 ]
Padlyak, B [1 ]
Davydov, V [1 ]
Simkiv, B [1 ]
Grinberg, M [1 ]
Kuklinski, B [1 ]
机构：
[1] Ivan Franko Natl Univ Lviv, Dept Phys, UA-79005 Lviv, Ukraine
来源：
INTERNATIONAL CONFERENCE ON SOLID STATE CRYSTALS 2000: EPILAYERS AND HETEROSTRUCTURES IN OPTOELECTRONICS AND SEMICONDUCTOR TECHNOLOGY | 2001年 / 4413卷
关键词：
GaN-Mn; thin film; rf-magnetron sputtering; cathodoluminescence; photoluminescence; ESR;
D O I：
10.1117/12.425402
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
The technologies of fabrication of thin film phosphors based on gallium nitride using rf-magnetron sputtering are developed and properties of films are studied. The dependence of GaN-Mn thin films deposition rate on rf-discharge power, substrate temperature and working gas pressure was estimated. The influence of technological conditions of deposition on crystal structure parameters of gallium nitride thin films were investigated. Luminescence and electron spin resonance (ESR) spectra of GaN-Mn thin films have been studied.
引用
收藏
页码：50 / 54
页数：5
相关论文
共 50 条
  • [31] Magnetic study of heavily Mn-doped CuO thin films
    L. Li
    B. Lv
    S. Wang
    J. Z. Cai
    W. Q. Zou
    X. S. Wu
    F. M. Zhang
    Journal of the Korean Physical Society, 2013, 62 : 1530 - 1533
  • [32] Magnetic study of heavily Mn-doped CuO thin films
    Li, L.
    Lv, B.
    Wang, S.
    Cai, J. Z.
    Zou, W. Q.
    Wu, X. S.
    Zhang, F. M.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2013, 62 (10) : 1530 - 1533
  • [33] Synthesis and ferromagnetism of Mn-doped nanocrystalline ZnO thin films
    Zhao, X.
    Zhang, P.
    Li, T.
    Harako, S.
    Okamoto, J.
    Komuro, S.
    Hirao, N.
    2012 12TH IEEE CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO), 2012,
  • [34] Structural and magnetic properties of Mn-doped CuO thin films
    Zhu, Hao
    Zhao, Fan
    Pan, Liqing
    Zhang, Yaping
    Fan, Chongfei
    Zhang, Yue
    Xiao, John Q.
    Journal of Applied Physics, 2007, 101 (09):
  • [35] Structures and magnetic properties of Mn-doped NiO thin films
    Hong, Dexiong
    Yan, Wensheng
    Liu, Qinghua
    Yao, Tao
    Sun, Zhihu
    Wei, Shiqiang
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2014, 47 (29)
  • [36] Electrical and magnetic properties of Mn-doped Si thin films
    Anh, T. T. Lan
    Yu, S. S.
    Ihm, Y. E.
    Kim, D. J.
    Kim, H. J.
    Hong, S. K.
    Kim, C. S.
    PHYSICA B-CONDENSED MATTER, 2009, 404 (12-13) : 1686 - 1688
  • [37] Structural and magnetic properties of Mn-doped CuO thin films
    Zhu, Hao
    Zhao, Fan
    Pan, Liqing
    Zhang, Yaping
    Fan, Chongfei
    Zhang, Yue
    Xiao, John Q.
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (09)
  • [38] Multivalent Mn-doped TiO2 thin films
    Lin, C. Y. W.
    Channei, D.
    Koshy, P.
    Nakaruk, A.
    Sorrell, C. C.
    PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES, 2012, 44 (10): : 1969 - 1972
  • [39] Improved ferroelectric properties in Mn-doped PZT thin films
    Zhang, Q
    Whatmore, RW
    INTEGRATED FERROELECTRICS, 2003, 52 : 73 - 84
  • [40] Structural and photoluminescence analysis of Mn-doped ZnO thin films
    Chen X.-C.
    Kang C.-Y.
    Yang Y.-J.
    Xu P.-S.
    Pan G.-Q.
    Faguang Xuebao/Chinese Journal of Luminescence, 2011, 32 (12): : 1247 - 1250
12345