Surface Modification of Oxide Nanowires by Nitrogen Plasma

被引:10
|
作者
Lim, Taekyung [1 ]
Lee, Sumi [1 ]
Suh, Misook [1 ]
Ju, Sanghyun [1 ]
机构
[1] Kyonggi Univ, Dept Phys, Suwon 443760, Gyeonggi Do, South Korea
关键词
ELECTRICAL-PROPERTIES; FIELD-EMISSION; FABRICATION; TRANSISTORS;
D O I
10.1149/1.3562274
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
The amount of oxygen vacancies on the surface of SnO2 nanowires was controlled by N-2 plasma. Nitrogen ions in N-2 plasma were substituted for oxygen vacancies (V-o) on the nanowire surface, reducing the amount of oxygen vacancies. Photoluminescence spectra showed that the V-o-related peak around 600 nm decreased dramatically after N-2 plasma and increased again after ultravioleto-zone (UVO) treatment. The threshold voltage (V-th) of the SnO2 nanowire transistors exhibited a +1.8 V positive shift after N-2 plasma, and the V-th of the N-2 plasma-treated nanowire transistors shifted toward the negative direction (-0.76 V) again after UVO. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3562274] All rights reserved.
引用
收藏
页码:H218 / H221
页数:4
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