Optical properties of PLZT thin films determined using reflection spectra

被引:1
|
作者
Pencheva, T [1 ]
机构
[1] Univ Rousse, Dept Phys, Rousse 7017, Bulgaria
关键词
D O I
10.1109/ISSE.2003.1260554
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical properties of thin PLZT films of various stoichiometry are determined using reflectance spectra processing. The knowledge of optical properties of PLZT thin films is quite necessary for opto-electronic applications. Materials like PLZT are attractive for the application in integrated optics and for realisation of various microelectronic and opto-electronic devices. Their optical properties are strongly dependent on deposition conditions and defects concentration. Thin PLZT films are prepared by pulsed laser deposition on sapphire substrates at different oxygen pressure. Film structure is investigated by WDX. Changes of film refractive index n(lambda), extinction k(lambda) with wavelength in the spectral region 0.3 - 1.1 mum and film thickness d are determined as a result of films reflectance spectra modeling and fitting procedure using all points of the spectra.
引用
收藏
页码:371 / 374
页数:4
相关论文
共 50 条
  • [41] OPTICAL REFLECTION AND TRANSMISSION FORMULAE FOR THIN FILMS
    TOMLIN, SG
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1968, 1 (12) : 1667 - &
  • [42] OPTICAL REFLECTION AND TRANSMISSION OF THIN ALUMINUM FILMS
    GAREE, WA
    PHYSICAL REVIEW, 1954, 96 (03): : 815 - 815
  • [43] Optical properties study of PLZT films deposited on sapphire Substrate
    Khodorov, A.
    Gomes, M. J. M.
    VACUUM, 2008, 82 (12) : 1495 - 1498
  • [44] Optical properties of PLZT
    Ichiki, Masaaki
    Shimasaki, Tsuyoshi
    Yoshii, Hiroshige
    Asahi, Toru
    Kobayashi, Jinzo
    Ikawa, Hiroyuki
    Ferroelectrics, 1994, 152 (1 -4 pt 2) : 289 - 293
  • [45] Structural and electrical properties of excimer laser deposited PLZT thin films
    Cheng, HF
    APPLIED SURFACE SCIENCE, 1996, 92 (92) : 378 - 381
  • [46] PREPARATION AND PROPERTIES OF FERROELECTRIC PLZT THIN-FILMS BY RF SPUTTERING
    ISHIDA, M
    MATSUNAMI, H
    TANAKA, T
    JOURNAL OF APPLIED PHYSICS, 1977, 48 (03) : 951 - 953
  • [47] Piezoelectric properties of micro-machined cantilever PLZT thin films
    Cheng, CH
    Xu, YH
    Cherry, HB
    Tseng, J
    Um, G
    Wen, WJ
    Mackenzie, JD
    FERROELECTRICS, 1999, 232 (1-4) : 1039 - 1044
  • [48] Microstructure and electric properties of sol-gel PLZT thin films
    Tsukada, M.
    Cross, J.S.
    Fujiki, M.
    Matsuura, K.
    Ashida, H.
    Otani, S.
    Key Engineering Materials, 1999, 169 : 131 - 134
  • [49] PROPERTIES OF EPITAXIALLY GROWN PLZT SINGLE CRYSTALLINE THIN-FILMS
    MATSUNAMI, H
    ISHIDA, M
    KIMURA, K
    TANAKA, T
    FERROELECTRICS, 1980, 29 (1-2) : 125 - 125
  • [50] Preparation and ferroelectric properties of PLZT (7.5/65/35) thin films
    Huang, Longbo
    Li, Zuoyi
    Lu, Dexin
    Liu, Jianshe
    Huazhong Ligong Daxue Xuebao/Journal Huazhong (Central China) University of Science and Technology, 1995, 23 (03):