Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors

被引：18

作者：

Shikida, Mitsuhiro ^{[1
]}

Hasegawa, Yoshihiro ^{[1
]}

Farisi, Muhammad Salman Al ^{[1
]}

Matsushima, Miyoko ^{[2
]}

Kawabe, Tsutomu ^{[2
]}

机构：

[1] Hiroshima City Univ, Grad Sch Informat Sci, Dept Biomed Informat Sci, Asaminami Ku, 3-4-1 Ozuka Higashi, Hiroshima 7313194, Japan

[2] Nagoya Univ, Tokai Natl Higher Educ & Res Syst, Grad Sch Med,Div Host Def Sci, Dept Integrated Hlth Sci,Omics Hlth Sci,Higashi K, 1-1-20 Daiko Minami, Nagoya, Aichi 4618673, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2022年 / 61卷 / SA期

关键词：

MEMS; Microsensor; Microneedle; Medical applications; PHOTOLITHOGRAPHIC PATTERN TRANSFER; FLOW-SENSOR; SILICON; FABRICATION;

D O I：

10.35848/1347-4065/ac305d

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Since their early stages of development, micro-electro-mechanical systems (MEMS) have shown potential for breakthroughs in the fabrication of medical tools. The miniaturization of various devices using MEMS technology has enabled minimally invasive treatments and in situ measurements. In this paper, we introduce two advancements in MEMS applications in the medical field: (1) microneedle devices for brain activity evaluation, a transdermal drug delivery system, and biological fluid sampling; and (2) miniaturized MEMS sensors for monitoring the conditions inside blood vessels and respiratory organs. In addition, we provide a summary of MEMS sensors used in developing new drugs, detecting vital signs, and other applications.

引用

页数：7

共 50 条

[41] Integrated Temperature and Hydrogen Sensors with MEMS Technology
Jiang, Hongchuan
Huang, Min
Yu, Yibing
Tian, Xiaoyu
Zhao, Xiaohui
Zhang, Wanli
Zhang, Jianfeng
Huang, Yifan
Yu, Kun
SENSORS, 2018, 18 (01):
[42] Application of MEMS technology in automotive sensors and actuators
Eddy, DS
Sparks, DR
PROCEEDINGS OF THE IEEE, 1998, 86 (08) : 1747 - 1755
[43] Improved MEMS AE sensors in HARM technology
Sommer, R.
Freitag, M.
Schaufuss, J.
Sorger, A.
Mehner, J.
2014 11TH INTERNATIONAL MULTI-CONFERENCE ON SYSTEMS, SIGNALS & DEVICES (SSD), 2014,
[44] Special issue - packaging technology for sensors and MEMS
不详
MICROELECTRONICS INTERNATIONAL, 2002, 19 (03) : 7 - 7
[45] Implantable MEMS sensors and medical MEMS packaging issues for future implants
Baum, M.
Haubold, M.
Wiemer, M.
Gessner, T.
BIOMEDICAL ENGINEERING-BIOMEDIZINISCHE TECHNIK, 2014, 59 : S1026 - +
[46] Application of MEMS technology in automotive sensors and actuators
Sparks, DR
Chang, SC
Eddy, DS
MHS '98, PROCEEDINGS OF THE 1998 INTERNATIONAL SYMPOSIUM ON MICROMECHATRONICS AND HUMAN SCIENCE, 1998, : 9 - 15
[47] ELECTRIC FIELD SENSORS BASED ON MEMS TECHNOLOGY
Gong Chao Xia Shanhong Deng Kai Bai Qiang Chen Shaofeng State Key Lab of Transducer Technology Institute of Electronics Chinese Academy of Sciences Beijing China
Journal of Electronics, 2005, (04) : 443 - 448
[48] Advancements in Passive Wireless Sensors, Materials, Devices, and Applications
He, Denghui
Cui, Yuanhui
Ming, Fangchao
Wu, Weiping
SENSORS, 2023, 23 (19)
[49] Miniaturized electrochemical sensors and their point-of-care applications
Zhang, Wei
Wang, Ruiguo
Luo, Fang
Wang, Peilong
Lin, Zhenyu
CHINESE CHEMICAL LETTERS, 2020, 31 (03) : 589 - 600
[50] A comprehensive review on advancements in sensors for air pollution applications
Seesaard, Thara
Kamjornkittikoon, Kamonrat
Wongchoosuk, Chatchawal
SCIENCE OF THE TOTAL ENVIRONMENT, 2024, 951

← 1 2 3 4 5 →