Advancements in MEMS technology for medical applications: microneedles and miniaturized sensors

被引：18

作者：

Shikida, Mitsuhiro ^{[1
]}

Hasegawa, Yoshihiro ^{[1
]}

Farisi, Muhammad Salman Al ^{[1
]}

Matsushima, Miyoko ^{[2
]}

Kawabe, Tsutomu ^{[2
]}

机构：

[1] Hiroshima City Univ, Grad Sch Informat Sci, Dept Biomed Informat Sci, Asaminami Ku, 3-4-1 Ozuka Higashi, Hiroshima 7313194, Japan

[2] Nagoya Univ, Tokai Natl Higher Educ & Res Syst, Grad Sch Med,Div Host Def Sci, Dept Integrated Hlth Sci,Omics Hlth Sci,Higashi K, 1-1-20 Daiko Minami, Nagoya, Aichi 4618673, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 2022年 / 61卷 / SA期

关键词：

MEMS; Microsensor; Microneedle; Medical applications; PHOTOLITHOGRAPHIC PATTERN TRANSFER; FLOW-SENSOR; SILICON; FABRICATION;

D O I：

10.35848/1347-4065/ac305d

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Since their early stages of development, micro-electro-mechanical systems (MEMS) have shown potential for breakthroughs in the fabrication of medical tools. The miniaturization of various devices using MEMS technology has enabled minimally invasive treatments and in situ measurements. In this paper, we introduce two advancements in MEMS applications in the medical field: (1) microneedle devices for brain activity evaluation, a transdermal drug delivery system, and biological fluid sampling; and (2) miniaturized MEMS sensors for monitoring the conditions inside blood vessels and respiratory organs. In addition, we provide a summary of MEMS sensors used in developing new drugs, detecting vital signs, and other applications.

引用

页数：7

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