共 50 条
- [31] BioMEA™: A versatile high-density 3D microelectrode array system using integrated electronics BIOSENSORS & BIOELECTRONICS, 2010, 25 (08): : 1889 - 1896
- [33] Real-time ultraviolet ellipsometry monitoring of gate patterning in a high-density plasma JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1997, 15 (03): : 865 - 870
- [37] Well-Shaped Microelectrode Array Structure for High-Density CMOS Amperometric Electrochemical Sensor Array IEICE TRANSACTIONS ON ELECTRONICS, 2016, E99C (06): : 663 - 666