We discuss the formation of a Si/Ge-superlattice (SL) generated by molecular beam epitaxy. Specific growth parameter were chosen to optimize the periodic structure of vertically stacked Ge islands. Optimized SLs show a strong photoluminescence at a wavelength in the region of 1.55 mum up to room temperature. The luminescence is explained by a recombination of electrons in a miniband and holes localized in the Ge islands. The morphology and the crystal structure of the SL, which are influenced by the growth parameters, were analyzed by transmission electron microscopy techniques. It is demonstrated that doping of the SL structure by antimony improves both structural and optical properties. (C) 2003 American Institute of Physics.
机构:
Akita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, JapanAkita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, Japan
Suzuki, Toshio
Sasaki, Tomoyuki
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TDK Corp, SQ Res Ctr, Nagano 3858555, JapanAkita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, Japan
Sasaki, Tomoyuki
Oikawa, Tohru
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TDK Corp, SQ Res Ctr, Nagano 3858555, JapanAkita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, Japan
Oikawa, Tohru
Shiraishi, Masashi
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Osaka Univ, Grad Sch Engn Sci, Osaka 5608531, JapanAkita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, Japan
Shiraishi, Masashi
Suzuki, Yoshishige
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Osaka Univ, Grad Sch Engn Sci, Osaka 5608531, JapanAkita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, Japan
Suzuki, Yoshishige
Noguchi, Kiyoshi
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TDK Corp, SQ Res Ctr, Nagano 3858555, JapanAkita Prefectural Res & Dev Ctr, Akita Res Inst Adv Technol, AIT, Akita 0101623, Japan
机构:
Nagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
IHP Leibniz Inst Innovat Mikroelekt, Technologiepk 25, D-15236 Frankfurt, GermanyNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
Makihara, Katsunori
Yamamoto, Yuji
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IHP Leibniz Inst Innovat Mikroelekt, Technologiepk 25, D-15236 Frankfurt, GermanyNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
Yamamoto, Yuji
Imai, Yuki
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Nagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, JapanNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
Imai, Yuki
Taoka, Noriyuki
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Nagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, JapanNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
Taoka, Noriyuki
Schubert, Markus Andreas
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IHP Leibniz Inst Innovat Mikroelekt, Technologiepk 25, D-15236 Frankfurt, GermanyNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
Schubert, Markus Andreas
Tillack, Bernd
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IHP Leibniz Inst Innovat Mikroelekt, Technologiepk 25, D-15236 Frankfurt, Germany
Tech Univ Berlin, HFT4, Einsteinufer 25, D-10587 Berlin, GermanyNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
Tillack, Bernd
Miyazaki, Seiichi
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Nagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, JapanNagoya Univ, Grad Sch Engn, Furo cho, Chikusa ku, Nagoya 4648603, Japan
机构:
State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of SciencesState Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences
安俊明
吴远大
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State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of SciencesState Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences
机构:
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, BeijingState Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing
Wang Y.
An J.-M.
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State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, BeijingState Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing
An J.-M.
Wu Y.-D.
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State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, BeijingState Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing
Wu Y.-D.
Hu X.-W.
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机构:
State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, BeijingState Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing
机构:
Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Hu, Weixuan
Cheng, Buwen
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机构:
Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Cheng, Buwen
Xue, Chunlai
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Xue, Chunlai
Xue, Haiyun
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Xue, Haiyun
Su, Shaojian
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Su, Shaojian
Bai, Anqi
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Bai, Anqi
Luo, Liping
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Luo, Liping
Yu, Yude
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
Yu, Yude
Wang, Qiming
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Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R ChinaChinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China