Novel Fabrication Technique of Suspended Nanowire Devices for Nanomechanical Applications

被引：0
|
作者：
Tomita, Wataru [1 ,2 ]
Sasaki, Satoshi [1 ]
Tateno, Kouta [1 ]
Okamoto, Hajime [1 ]
Yamaguchi, Hiroshi [1 ,2 ]
机构：
[1] NIT Corp, Basic Res Labs, Tokyo, Japan
[2] Tohoku Univ, Dept Phys, Sendai, Miyagi, Japan
来源：
2019 COMPOUND SEMICONDUCTOR WEEK (CSW) | 2019年
关键词：
D O I：
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
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页数：1
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