Improved device performance in nonpolar a-plane GaN LEDs using a Ni/Al/Ni/Au n-type ohmic contact

被引:5
|
作者
Kim, Dong Ho [1 ]
Kim, Su Jin [1 ]
Kim, Seung Hwan [2 ]
Jeong, Tak [2 ]
Hwang, Sung Min [3 ]
Kim, Tae Geun [1 ]
机构
[1] Korea Univ, Sch Elect & Elect Engn, Seoul 136701, South Korea
[2] Korea Photon Technol Inst, LED Device Team, Kwangju 500779, South Korea
[3] Korea Elect Technol Inst, Optoelect Lab, Gyeonggi 463816, South Korea
来源
基金
新加坡国家研究基金会;
关键词
nonpolar GaN; LED; Ni-Al alloys; current injection; VAPOR-PHASE EPITAXY; SAPPHIRE;
D O I
10.1002/pssr.201105265
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The authors report upon the increased light-output power (P(out)) via a reduction in the forward voltage (V(f)) for nonpolar a-plane GaN LEDs using Ni/Al/Ni/Au n-type ohmic contacts. The specific contact resistivity of the Ni/Al/Ni/Au contact is found to be as low as 5.6 x 10 (5) whereas that of a typical Ti/Al/Ni/Au contact is 6.8 x 10(-4) cm(2), after annealing at 700 degrees C. The X-ray photoelectron spectroscopy results show that the upward surface band bending is less pronounced for the Ni/Al contact compared to the Ti/Al contact, leading to a decrease in the effective Schottky barrier height (SBH). The V(f) of the nonpolar LEDs decreases by 10% and P(out) increases by 15% when the Ni/Al/Ni/Au scheme is used instead of the typical Ti/Al/Ni/Au metal scheme. (C) 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:274 / 276
页数:3
相关论文
共 50 条
  • [41] High-transparency Ni/Au Ohmic contact to p-type GaN
    Sheu, JK
    Su, YK
    Chi, GC
    Jou, MJ
    Chang, CM
    Liu, CC
    Hung, WC
    BLUE LASER AND LIGHT EMITTING DIODES II, 1998, : 638 - 641
  • [42] Low resistance Ti/Al/Ni/Au Ohmic contact to (NH4)2Sx treated n-type GaN for high temperature applications
    Lin, F.
    Shen, B.
    Huang, S.
    Xu, F. J.
    Yang, H. Y.
    Chen, W. H.
    Ma, N.
    Qin, Z. X.
    Zhang, G. Y.
    2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1-4, 2008, : 726 - 729
  • [43] Temperature dependence of the specific resistance in Ti/Al/Ni/Au contacts on n-type GaN
    Iucolano, F.
    Roccaforte, F.
    Alberti, A.
    Bongiorno, C.
    Di Franco, S.
    Raineri, V.
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (12)
  • [44] Microstructure of Ti/Al and Ti/Al/Ni/Au ohmic contacts for n-GaN
    Ruvimov, S
    LilientalWeber, Z
    Washburn, J
    Duxstad, KJ
    Haller, EE
    Fan, ZF
    Mohammad, SN
    Kim, W
    Botchkarev, AE
    Morkoc, H
    APPLIED PHYSICS LETTERS, 1996, 69 (11) : 1556 - 1558
  • [45] The thermal stability of Ni and Ni/Au ohmic contacts to n-type 4H-SiC
    Kim, BK
    Burm, J
    An, C
    2002 12TH INTERNATIONAL CONFERENCE ON SEMICONDUCTING & INSULATING MATERIALS, 2002, : 97 - 101
  • [46] Study of Ti/Au, Ti/Al/Au, and Ti/Al/Ni/Au ohmic contacts to n-GaN
    Qin, ZX
    Chen, ZZ
    Tong, YZ
    Ding, XM
    Hu, XD
    Yu, TJ
    Zhang, GY
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2004, 78 (05): : 729 - 731
  • [47] Improved crystal quality of nonpolar a-plane GaN based on the nano pattern formed by the annealed thin Ni layer
    Tao, Hongchang
    Xu, Shengrui
    Mao, Wei
    Fan, Xiaomeng
    Du, Jinjuan
    Peng, Ruoshi
    Zhao, Ying
    Li, Wen
    Gao, Yuan
    Zhang, Jincheng
    Hao, Yue
    SUPERLATTICES AND MICROSTRUCTURES, 2019, 130 : 539 - 544
  • [48] Study of Ti/Au, Ti/Al/Au, and Ti/Al/Ni/Au ohmic contacts to n-GaN
    Z.X. Qin
    Z.Z. Chen
    Y.Z. Tong
    X.M. Ding
    X.D. Hu
    T.J. Yu
    G.Y. Zhang
    Applied Physics A, 2004, 78 : 729 - 731
  • [49] Structural characterization of Ni and Ni/Ti ohmic contact on n-type 4H-SiC
    Siad, M.
    Abdesselam, M.
    Souami, N.
    Chami, A. C.
    APPLIED SURFACE SCIENCE, 2011, 257 (24) : 10737 - 10742
  • [50] Temperature optimization of the Ti/Al/Ni/Au ohmic contact formation to the AlGaN/GaN heterostructure
    Shostachenko, S. A.
    Porokhonko, Y. A.
    Zakharchenko, R. V.
    Burdykin, M. S.
    Ryzhuk, R. V.
    Kargin, N. I.
    Kalinin, B. V.
    Belov, A. A.
    Vasiliev, A. N.
    XVII WORKSHOP ON HIGH ENERGY SPIN PHYSICS (DSPIN-2017), 2018, 938