Effects of Dynamic Characters of the Macro-micro Fast Coupling System in Long Stroke System

被引：0
|
作者：
Wu Jianwei [1 ]
Yuan Yong [1 ]
Cui Jiwen [1 ]
机构：
[1] Harbin Inst Technol, Ultraprecis Optoelect Instrumentat Engn Ctr, Harbin 150080, Peoples R China
来源：
NINTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2015年 / 9446卷
关键词：
Dual-stage; wafer stage; long stroke system; coupling device;
D O I：
10.1117/12.2181599
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Macro-micro fast coupling system of dual-stage is used for the detachment and coupling of the macro-motion system and the wafer-stage. When the macro-motion system couples with the wafer-stage, the wafer-stage is driven by macro-motor to achieve long stroke motion. In this paper, the bottom air bearings of wafer stage are analyzed when the driving force of macro motor shifts the center of mass of wafer stage in Z direction. The X, Y, Z stiffness of the coupling system are obtained by using ANSYS.
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页数：8
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