Design and Simulations of High-Sensitivity Multi-Directional Inertial Sensor

被引：1
|
作者：
Taj, Mohammad [1 ]
Vikram, G. N. V. R. [1 ]
机构：
[1] Vignans Fdn Sci Technol & Res, Dept Elect & Commun Engn, Guntur 522213, Andhra Pradesh, India
来源：
IEEE SENSORS JOURNAL | 2022年 / 22卷 / 01期
关键词：
Sensors; Capacitance; Sensitivity; Inertial sensors; Electrodes; Capacitive sensors; Capacitance measurement; CoventorWare; SOI; SOIMUMPS; sensitivity; proof of mass;
D O I：
10.1109/JSEN.2021.3126469
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper proposed the high sensitive linear and rotational based differential capacitive inertial sensor. The designed sensor consists of a proof of mass, which resides in an air medium - the acceleration measured along with a change of displacement and the differential capacitance. Sensor modeling and simulation have done with CoventorWare software. SOIMUMPS fabrication process has described because it allows pattern on both sides of an SOI wafer. Solid mechanics and electrostatic analysis have applied for measurement of acceleration. The high sensitivity of 981.28fF/g has observed. The simulated results have tabulated. Finally, performance and future scope of the inertial sensor has discussed.
引用
收藏
页码：190 / 194
页数：5
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