A new photoresist based on poly(amidoamine) dendrimer

被引：1
|
作者：
Fujigaya, T [1 ]
Ueda, M [1 ]
机构：
[1] Tokyo Inst Technol, Dept Organ & Polymer Mat, Meguro Ku, Tokyo 1528552, Japan
来源：
KOBUNSHI RONBUNSHU | 2000年 / 57卷 / 12期
关键词：
poly(amidoamine) dendrimer; phenol group; photoresist; dissolution inhibitor; diazonaphthoquinone; positive type;
D O I：
10.1295/koron.57.836
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
A positive-working photoresist based on the first generation poly(amidoamine) dendrimer 2 having phenol groups on its periphery and diazonaphthoquinone (DNQ) as a photosensitive compound has been developed. Dendrimer 2b was prepared by the Michael addition reaction of N-(2-hydroxy-5-methylphenyl)-2-propenamide 1b with the first generation poly(amidoamine) dendrimer. Obtained 2b has a high transparency to UV-light above 300 nm. The photoresist consisting 2b and DNQ (30 wt%) showed a sensitivity of 65 mJ/cm(2) and a contrast of 3.0, when it was exposed to 365 nm light and developed with a 0.2 wt% aqueous tetramethylammonium hydroxide (TMAH) solution.
引用
收藏
页码：836 / 841
页数：6
相关论文
共 50 条
  • [21] Electrical and luminescence properties of a poly(amidoamine) dendrimer containing naphthalimide
    Kukhto, AV
    Kolesnik, ÉÉ
    Lappo, AN
    Pochtenny, AE
    Grabchev, IK
    PHYSICS OF THE SOLID STATE, 2004, 46 (12) : 2306 - 2310
  • [22] Heterogeneous polyamide composite membranes based on aromatic poly (amidoamine) dendrimer for molecular sieving
    Zhao, Shengchao
    Chen, Kuo
    Niu, Yuhui
    Yuan, Bingbing
    Jiang, Chi
    Wang, Ming
    Li, Peng
    Hou, Yingfei
    Sun, Haixiang
    Xia, Daohong
    Niu, Jason
    JOURNAL OF MEMBRANE SCIENCE, 2023, 671
  • [23] A poly(amidoamine) dendrimer-based drug carrier for delivering DOX to gliomas cells
    Li Y.
    He H.
    Lu W.
    Jia X.
    Lu, Wanliang (luwl@bjmu.edu.cn), 2017, Royal Society of Chemistry (07) : 15475 - 15481
  • [24] Stoichiometry and Structure of Poly(amidoamine) Dendrimer-Lipid Complexes
    Kelly, Christopher V.
    Liroff, Meghan G.
    Triplett, L. Devon
    Leroueil, Pascale R.
    Mullen, Douglas G.
    Wallace, Joseph M.
    Meshinchi, Sasha
    Baker, James R., Jr.
    Orr, Bradford G.
    Holl, Mark M. Banaszak
    ACS NANO, 2009, 3 (07) : 1886 - 1896
  • [25] Synthesis of Poly(amidoamine) Dendrimer with Redox-Active Spacers
    Chu, Chih-Chien
    Imae, Toyoko
    MACROMOLECULES, 2009, 42 (06) : 2295 - 2299
  • [26] Dodecyltrimethylammonium and Di(dodecyldimethylammonium) bromides interactions with poly (amidoamine) dendrimer
    Bakshi, MS
    Kaura, A
    Mahajan, RK
    Yoshimura, T
    Esumi, K
    COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2004, 246 (1-3) : 39 - 48
  • [27] Surface modification of poly(amidoamine) (PAMAM) dendrimer as antimicrobial agents
    Charles, Shakira
    Vasanthan, Nadarajah
    Kwon, Dong
    Sekosan, Gabriela
    Ghosh, Subhas
    TETRAHEDRON LETTERS, 2012, 53 (49) : 6670 - 6675
  • [28] Poly(amidoamine) dendrimer-supported organoplatinum antitumour agents
    Howell, B. A.
    Fan, D.
    PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2010, 466 (2117): : 1515 - 1526
  • [29] Optimization of first generation poly(amidoamine) starburst dendrimer synthesis
    Feldhaus, Joshua
    Oostendorp, David
    Johnston, Donna
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2016, 251
  • [30] Electrical and luminescence properties of a poly(amidoamine) dendrimer containing naphthalimide
    A. V. Kukhto
    É. É. Kolesnik
    A. N. Lappo
    A. E. Pochtenny
    I. K. Grabchev
    Physics of the Solid State, 2004, 46 : 2306 - 2310
12345