共 50 条
- [41] High energy focused ion beam lithography using P-beam writing NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2005, 241 (1-4): : 397 - 401
- [42] Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography SCIENTIFIC REPORTS, 2018, 8
- [43] Development of wide range energy focused ion beam lithography system JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (04): : 2484 - 2488
- [44] UNIQUE RESIST PROFILES WITH BE AND SI FOCUSED ION-BEAM LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (01): : 205 - 208
- [45] Focused ion beam lithography using novolak-based resist Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1988, 27 (09): : 1780 - 1782
- [46] Comparative study of plasmonic antennas fabricated by electron beam and focused ion beam lithography Scientific Reports, 8
- [47] A FOCUSED ION-BEAM SYSTEM FOR SUB-MICRON LITHOGRAPHY JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 41 - 44
- [50] Ion beam lithography for nano-scale pattern features ION-BEAM-BASED NANOFABRICATION, 2007, 1020 : 39 - 47