Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

被引:9
|
作者
Mahajan, Shreya [1 ]
Sharkins, Jonah A. [2 ,4 ]
Hunter, Allen H. [5 ]
Avishai, Amir [6 ]
Ereifej, Evon S. [2 ,3 ,4 ]
机构
[1] Univ Michigan, Dept Elect Engn & Comp Sci, Ann Arbor, MI 48109 USA
[2] Vet Affairs Ann Arbor Healthcare Syst, Ann Arbor, MI 48105 USA
[3] Univ Michigan, Dept Neurol, Sch Med, Ann Arbor, MI 48109 USA
[4] Univ Michigan, Dept Biomed Engn, Ann Arbor, MI 48109 USA
[5] Univ Michigan, Michigan Ctr Mat Characterizat, Ann Arbor, MI 48109 USA
[6] Carl Zeiss SMT Inc, Peabody, MA USA
来源
关键词
Bioengineering; Issue; 155; focused ion beam lithography; intracortical microelectrodes; nano-architecture; electrophysiology; neuroinflammation; biocompatibility; BRAIN-TISSUE; ELECTRODES; RESPONSES; SIGNAL; PERFORMANCE; FABRICATION; INTERFACE; MICROGLIA; RECEPTOR; IMPACT;
D O I
10.3791/60004
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
With advances in electronics and fabrication technology, intracortical microelectrodes have undergone substantial improvements enabling the production of sophisticated microelectrodes with greater resolution and expanded capabilities. The progress in fabrication technology has supported the development of biomimetic electrodes, which aim to seamlessly integrate into the brain parenchyma, reduce the neuroinflammatory response observed after electrode insertion and improve the quality and longevity of electrophysiological recordings. Here we describe a protocol to employ a biomimetic approach recently classified as nano-architecture. The use of focused ion beam lithography (FIB) was utilized in this protocol to etch specific nano-architecture features into the surface of non-functional and functional single shank intracortical microelectrodes. Etching nano-architectures into the electrode surface indicated possible improvements of biocompatibility and functionality of the implanted device. One of the benefits of using FIB is the ability to etch on manufactured devices, as opposed to during the fabrication of the device, facilitating boundless possibilities to modify numerous medical devices post-manufacturing. The protocol presented herein can be optimized for various material types, nano-architecture features, and types of devices. Augmenting the surface of implanted medical devices can improve the device performance and integration into the tissue.
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页数:11
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