High-Performance ALD Al-Doped ZnO Thin-Film Transistors Grown on Flexible Substrates

被引：17
|
作者：
Rezk, Ayman [1 ]
Saadat, Irfan [1 ]
机构：
[1] Khalifa Univ, Elect & Comp Engn Dept, Abu Dhabi, U Arab Emirates
来源：
IEEE ELECTRON DEVICE LETTERS | 2019年 / 40卷 / 02期
关键词：
Atomic layer deposition; doped zinc oxide; flexible structures; piezoelectric films; thin film transistors; zinc oxide; ELECTRICAL-PROPERTIES;
D O I：
10.1109/LED.2019.2890831
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report a CMOS compatible high-performance ALD Al-doped ZnO thin-film transistor (TFT) fabricated on flexible substrate with a sub-150 degrees C processing temperature. The TFTs channel are optimized through Al doping (2-3 at.%) using all low-temperature steps to enable flexible substrate processing while minimizing the piezoelectric effect in the channel. The optimized device has an electron mobility as high as similar to 30 cm(2)/Vs in comparison to earlier reported values of 0.1-0.7 cm(2)/Vs for ZnO TFTs while maintaining desired threshold voltages of 1-2 V and I-ON/I-OFF ratios of 10(7)-10(9).
引用
收藏
页码：240 / 242
页数：3
相关论文
共 50 条
  • [41] Low-Temperature, Solution-Processed and Alkali Metal Doped ZnO for High-Performance Thin-Film Transistors
    Park, Si Yun
    Kim, Beom Joon
    Kim, Kyongjun
    Kang, Moon Sung
    Lim, Keon-Hee
    Lee, Tae Il
    Myoung, Jae M.
    Baik, Hong Koo
    Cho, Jeong Ho
    Kim, Youn Sang
    ADVANCED MATERIALS, 2012, 24 (06) : 834 - 838
  • [42] Enhanced Stability Performance of Transparent Ozone ALD ZnO Thin-Film Transistors With SiAlOX Dielectric
    Zhao, Wanpeng
    Zhang, Ning
    Yao, Chong
    Zhang, Junfeng
    Huang, Tianfeng
    Liu, Yang
    Dong, Shurong
    Ye, Zhi
    Luo, Jikui
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2023, 70 (02) : 556 - 562
  • [43] Highly Transparent and Conductive Al-Doped ZnO/Ag/Al-Doped ZnO Multilayer Source/Drain Electrodes for Transparent Oxide Thin Film Transistors
    Choi, Kwang-Hyuk
    Choi, Yoon-Young
    Jeong, Jin-A
    Kim, Han-Ki
    Jeon, S.
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 14 (04) : H152 - H155
  • [44] High-performance polysilicon thin film transistors on steel substrates
    Wu, M
    Chen, Y
    Pangal, K
    Sturm, JC
    Wagner, S
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 266 : 1284 - 1288
  • [45] ALD-Grown ZnO Thin-Film Transistor with a Polymeric Dielectric
    Choi, Woon-Seop
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2009, 54 (02) : 678 - 681
  • [46] A HIGH-PERFORMANCE, FLEXIBLE SUBSTRATE FOR THIN-FILM MEDIA
    PERETTIE, D
    HWANG, W
    MCCARTHY, T
    PIERINI, P
    SPELIOTIS, D
    JUDY, J
    CHEN, Q
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1993, 120 (1-3) : 334 - 337
  • [47] CMOS Compatible Al-Doped ZnO Sol-Gel Thin-Film Properties
    Ben Moussa, Nizar
    Lajnef, Mohamed
    Jebari, Nessrine
    Mahut, Frederic
    Villebasse, Cedric
    Lafosse, Xavier
    David, Christophe
    Chaste, Julien
    Chtourou, Radhouane
    Herth, Etienne
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2022, 219 (07):
  • [48] High-performance ZnO Thin-Film Transistors Prepared by Atomic Layer Deposition at Low Temperature
    Li, Qi
    Dong, Junchen
    Han, Dedong
    Zhang, Xing
    Wang, Yi
    2021 5TH IEEE ELECTRON DEVICES TECHNOLOGY & MANUFACTURING CONFERENCE (EDTM), 2021,
  • [49] High-Performance 1-V ZnO Thin-Film Transistors With Ultrathin, ALD-Processed ZrO2 Gate Dielectric
    Yang, Jun
    Zhang, Yongpeng
    Wu, Qianqian
    Dussarrat, Christian
    Qi, Jie
    Zhu, Wenqing
    Ding, Xingwei
    Zhang, Jianhua
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 2019, 66 (08) : 3382 - 3386
  • [50] Improvement of characteristics of flexible Al-doped ZnO/Ag/Al-doped ZnO transparent conductive film using silver
    Manzen, Issei
    Yoshimura, Yukio
    Matsubara, Kazuki
    Nitta, Atsushi
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020, 38 (02):
12345