The effect of a GaN nucleation layer on GaN film properties grown by metalorganic chemical vapor deposition

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作者
VanderStricht, W [1 ]
Moerman, I [1 ]
Demeester, P [1 ]
Crawley, JA [1 ]
Thrush, EJ [1 ]
Middleton, PG [1 ]
Cowan, CT [1 ]
ODonnell, KP [1 ]
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[1] STATE UNIV GHENT,IMEC,DEPT INFORMAT TECHNOL,B-9000 GHENT,BELGIUM
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:231 / 236
页数:6
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