The effect of a GaN nucleation layer on GaN film properties grown by metalorganic chemical vapor deposition

被引:0
|
作者
VanderStricht, W [1 ]
Moerman, I [1 ]
Demeester, P [1 ]
Crawley, JA [1 ]
Thrush, EJ [1 ]
Middleton, PG [1 ]
Cowan, CT [1 ]
ODonnell, KP [1 ]
机构
[1] STATE UNIV GHENT,IMEC,DEPT INFORMAT TECHNOL,B-9000 GHENT,BELGIUM
来源
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:231 / 236
页数:6
相关论文
共 50 条
  • [1] Optical properties of GaN film grown by metalorganic chemical vapor deposition
    Zhang, R
    Yang, K
    Qin, LH
    Shen, B
    Shi, HT
    Shi, Y
    Gu, SL
    Zheng, YD
    Huang, ZC
    Chen, JC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1996, 14 (03): : 840 - 843
  • [2] Influence of the nucleation layer annealing atmosphere on the resistivity of GaN grown by metalorganic chemical vapor deposition
    Luo, Weike
    Li, Liang
    Li, Zhonghui
    Dong, Xun
    Peng, Daqing
    Zhang, Dongguo
    Xu, Xiaojun
    JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 633 : 494 - 498
  • [3] Photoreflectance study of GaN film grown by metalorganic chemical vapor deposition
    Yang, K
    Zhang, R
    Zheng, YD
    Qin, LH
    Shen, B
    Shi, HT
    Huang, ZC
    Chen, JC
    III-NITRIDE, SIC AND DIAMOND MATERIALS FOR ELECTRONIC DEVICES, 1996, 423 : 735 - 739
  • [4] Influence of gallium supersaturation on the properties of GaN grown by metalorganic chemical vapor deposition
    Mita, S.
    Collazo, R.
    Rice, A.
    Dalmau, R. F.
    Sitar, Z.
    JOURNAL OF APPLIED PHYSICS, 2008, 104 (01)
  • [5] Impact of thickness of GaN buffer layer on properties of AlN/GaN distributed Bragg reflectors grown by metalorganic chemical vapor deposition
    WU ChaoMin SHANG JingZhi ZHANG BaoPing ZHANG JiangYong YU JinZhong WANG QiMing Department of Physics and Semiconductor Photonics Research Center Xiamen University Xiamen China PenTung Sah MicroNano Technology Research Center Xiamen University Xiamen China State Key Laboratory on Integrated Optoelectronics Institute of Semiconductors Chinese Academy of Sciences Beijing China
    中国科学:技术科学, 2010, (02) : 203 - 203
  • [6] Impact of thickness of GaN buffer layer on properties of AlN/GaN distributed Bragg reflectors grown by metalorganic chemical vapor deposition
    Wu ChaoMin
    Shang JingZhi
    Zhang BaoPing
    Zhang JiangYong
    Yu JinZhong
    Wang QiMing
    SCIENCE CHINA-TECHNOLOGICAL SCIENCES, 2010, 53 (02) : 313 - 316
  • [7] GaN homoepitaxial layers grown by metalorganic chemical vapor deposition
    Leszczynski, M
    Beaumont, B
    Frayssinet, E
    Knap, W
    Prystawko, P
    Suski, T
    Grzegory, I
    Porowski, S
    APPLIED PHYSICS LETTERS, 1999, 75 (09) : 1276 - 1278
  • [8] Impact of thickness of GaN buffer layer on properties of AlN/GaN distributed Bragg reflectors grown by metalorganic chemical vapor deposition
    ChaoMin Wu
    JingZhi Shang
    BaoPing Zhang
    JiangYong Zhang
    JinZhong Yu
    QiMing Wang
    Science China Technological Sciences, 2010, 53 : 313 - 316
  • [9] Impact of thickness of GaN buffer layer on properties of AlN/GaN distributed Bragg reflectors grown by metalorganic chemical vapor deposition
    WU ChaoMin1
    2 Pen-Tung Sah Micro/Nano Technology Research Center
    3 State Key Laboratory on Integrated Optoelectronics
    Science China(Technological Sciences), 2010, (02) : 313 - 316
  • [10] Optical Anisotropic Properties of m-Plane GaN Film Grown by Metalorganic Chemical Vapor Deposition
    Kong Jieying
    Zhang Rong
    Zhang Yong
    Liu Chengxiang
    Xie Zili
    Liu Bin
    Zhu Shining
    Min Naiben
    Zheng Youdou
    JOURNAL OF RARE EARTHS, 2007, 25 : 356 - 359