Development of a new generation of 3D pixel sensors for HL-LHC

被引：29
|
作者：
Betta, G. -F. Dalla [1 ,2 ]
Boscardin, M. [2 ,3 ]
Darbo, G. [4 ]
Mendicino, R. [1 ,2 ]
Meschini, M. [5 ]
Messineo, A. [6 ,7 ]
Ronchin, S. [3 ]
Sultan, D. M. S. [1 ,2 ]
Zorzi, N. [2 ,3 ]
机构：
[1] Univ Trento, Dipartimento Ingn Ind, I-38123 Trento, Italy
[2] TIFPA INFN, I-38123 Trento, Italy
[3] Fdn Bruno Kessler, I-38123 Trento, Italy
[4] Ist Nazl Fis Nucl, Sez Genova, I-16146 Genoa, Italy
[5] Ist Nazl Fis Nucl, Sez Firenze, I-50019 Sesto Fiorentino, Italy
[6] Univ Pisa, Dipartimento Fis, I-56127 Pisa, Italy
[7] Ist Nazl Fis Nucl, Sez Pisa, I-56127 Pisa, Italy
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2016年 / 824卷
关键词：
3D silicon sensors; Deep Reactive Ion Etching; Fabrication technology;
D O I：
10.1016/j.nima.2015.08.032
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper covers the main technological and design aspects relevant to the development of a new generation of thin 3D pixel sensors with small pixel size aimed at the High-Luminosity LHC upgrades. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：386 / 387
页数：2
相关论文
共 50 条
  • [21] Development of a Detector Control System for the ATLAS Pixel detector in the HL-LHC
    Lehmann, N.
    Karagounis, M.
    Kersten, S.
    Zeitnitz, C.
    JOURNAL OF INSTRUMENTATION, 2016, 11
  • [22] Quality Control (QC) of FBK preproduction 3D Si sensors for ATLAS HL-LHC Upgrades
    Sultan, D. M. S.
    Samy, M. A. Abdulla
    Ye, J. X.
    Boscardin, M.
    Ficorella, F.
    Ronchina, S.
    Dalla Bettaa, G. -F
    JOURNAL OF INSTRUMENTATION, 2022, 17 (12):
  • [23] Radiation-hard active CMOS pixel sensors for HL-LHC detector upgrades
    Backhaus, Malte
    JOURNAL OF INSTRUMENTATION, 2015, 10
  • [24] Development of pixel sensors with 25 x 500 μm2 pitch for the ATLAS HL-LHC upgrade
    Burdin, S.
    Casse, G.
    Dervan, P.
    Forshaw, D.
    Hayward, H.
    Tsurin, I.
    Wormald, M.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2014, 765 : 114 - 117
  • [25] A prototype of a new generation readout ASIC in 65nm CMOS for pixel detectors at HL-LHC
    Monteil, E.
    Pacher, L.
    Paterno, A.
    Loddo, F.
    Demaria, N.
    Gaioni, L.
    De Canio, F.
    Traversi, G.
    Re, V.
    Ratti, L.
    Rivetti, A.
    Rolo, M. Da Rocha
    Dellacasa, G.
    Mazza, G.
    Marzocca, C.
    Licciulli, F.
    Ciciriello, F.
    Marconi, S.
    Placidi, P.
    Magazzu, G.
    Stabile, A.
    Mattiazzo, S.
    Veri, C.
    JOURNAL OF INSTRUMENTATION, 2016, 11
  • [26] Silicon Sensors for HL-LHC Tracking Detectors
    Kuehn, Susanne
    2012 IEEE NUCLEAR SCIENCE SYMPOSIUM AND MEDICAL IMAGING CONFERENCE RECORD (NSS/MIC), 2012, : 1653 - 1656
  • [27] Silicon sensors for HL-LHC tracking detectors
    Mandic, Igor
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2013, 732 : 126 - 129
  • [28] The INFN-FBK pixel R&D program for HL-LHC
    Meschini, M.
    Dalla Betta, G. F.
    Boscardin, M.
    Calderini, G.
    Darbo, G.
    Giacomini, G.
    Messineo, A.
    Ronchin, S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2016, 831 : 116 - 121
  • [29] Development of n-in-p pixel modules for the ATLAS upgrade at HL-LHC
    Macchiolo, A.
    Nisius, R.
    Savic, N.
    Terzo, S.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2016, 831 : 111 - 115
  • [30] Thin n-in-p planar pixel sensors and active edge sensors for the ATLAS upgrade at HL-LHC
    Terzo, S.
    Macchiolo, A.
    Nisius, R.
    Paschen, B.
    JOURNAL OF INSTRUMENTATION, 2014, 9
12345