Effect of post-sputter polishing on the performance of a disc-shaped Pd/ZrO2/Ni hydrogen membrane

被引：6

作者：

Hwang, Kyung-Ran ^{[1
]}

Lee, Sung-Wook ^{[1
,2
]}

Oh, Duck-Kyu ^{[1
,2
]}

Lee, Chun-Boo ^{[1
,2
]}

Park, Jong-Soo ^{[1
]}

机构：

[1] Korea Inst Energy Res, 102 Gajeong Ro, Daejeon 305343, South Korea

[2] Korea Univ, Dept Chem & Biol Engn, 5 Ga, Seoul 136701, South Korea

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2016年 / 685卷

关键词：

Pd/ZrO2/Ni membrane; Hydrogen; Post-sputter polishing; Disc shaped membrane; H-2/N-2; selectivity; THIN PD MEMBRANE; COMPOSITE MEMBRANE; SUBSTRATE; METAL;

D O I：

10.1016/j.jallcom.2016.05.205

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A thin and highly selective Pd/ZrO2/Ni membrane (Pd layer: 3.4-3.7 mu m) was fabricated using repetitive cycles of sputtering and polishing processes without any further thermal treatment. Based on the results of a vacuum leak test through the membrane, the polishing step could effectively eliminate some of the defects formed between Pd columns by filling and surface flattening. The prepared Pd membrane exhibited a high hydrogen permeation flux (31.7 ml/min/cm(2)) and a significantly high H-2/N-2 selectivity at del-P = 1 bar and 400 degrees C. The membrane selectivity remained significantly high (24,157 at del-P = 20 bar) even under a large pressure difference. (C) 2016 Elsevier B.V. All rights reserved.

引用

页码：337 / 343

页数：7

共 36 条

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