Fabrication of reinforced nanoporous membranes

被引：0

作者：

Hoogerwerf, A. C. ^{[1
]}

Hinderling, C. ^{[1
]}

Krishnamoorthy, S. ^{[2
]}

Hibert, C. ^{[1
]}

Spassov, V. ^{[1
]}

Overstolz, T. ^{[1
]}

机构：

[1] CSEM SA, Rue Jaquet Droz 1, CH-2002 Neuchatel, Switzerland

[2] Fujirebio Inc, Tokyo, Japan

来源：

TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年

关键词：

nanotechnology; membranes; mechanical design; MST; MEMS; block copolymers;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fabrication technology to create reinforced nanoporous membranes of 60 nm, thick is described. The technology uses a variety of micromachining processes to form a reinforced membrane. Block copolymer micelle formation is used to define the pores 20 to 30 nm, in diameter that are subsequently etched in the membrane using Deep Reactive Ion Etching (DRIE). The membrane is made of a silicon nitride polysilicon sandwich that allows a post-etching reduction of the pore size though the oxidation of the polysilicon.

引用

页数：2

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