Fabrication of reinforced nanoporous membranes

被引：0
|
作者：
Hoogerwerf, A. C. [1 ]
Hinderling, C. [1 ]
Krishnamoorthy, S. [2 ]
Hibert, C. [1 ]
Spassov, V. [1 ]
Overstolz, T. [1 ]
机构：
[1] CSEM SA, Rue Jaquet Droz 1, CH-2002 Neuchatel, Switzerland
[2] Fujirebio Inc, Tokyo, Japan
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
nanotechnology; membranes; mechanical design; MST; MEMS; block copolymers;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A fabrication technology to create reinforced nanoporous membranes of 60 nm, thick is described. The technology uses a variety of micromachining processes to form a reinforced membrane. Block copolymer micelle formation is used to define the pores 20 to 30 nm, in diameter that are subsequently etched in the membrane using Deep Reactive Ion Etching (DRIE). The membrane is made of a silicon nitride polysilicon sandwich that allows a post-etching reduction of the pore size though the oxidation of the polysilicon.
引用
收藏
页数：2
相关论文
共 50 条
  • [31] Fabrication and gas separation properties of polybenzimidazole (PBI)/nanoporous silicates hybrid membranes
    Choi, Sunho
    Coronas, Joaquin
    Lai, Zhiping
    Yust, David
    Onorato, Frank
    Tsapatsis, Michael
    JOURNAL OF MEMBRANE SCIENCE, 2008, 316 (1-2) : 145 - 152
  • [32] Fabrication and Optimisation of Alumina Nanoporous Membranes for Drug Delivery Applications: A Comparative Study
    Osama, Lamyaa
    Handal, Hala T.
    El-Sayed, Sara A. M.
    Elzayat, Emad M.
    Mabrouk, Mostafa
    NANOMATERIALS, 2024, 14 (13)
  • [33] Development and Analysis of Electrochemical Reactor with Vibrating Functional Element for AAO Nanoporous Membranes Fabrication
    Cigane, Urte
    Palevicius, Arvydas
    Jurenas, Vytautas
    Pilkauskas, Kestutis
    Janusas, Giedrius
    SENSORS, 2022, 22 (22)
  • [34] Fabrication of metallic nanowire arrays by electrodeposition into nanoporous alumina membranes: effect of barrier layer
    Sharma, Gaurav
    Pishko, Michael V.
    Grimes, Craig A.
    JOURNAL OF MATERIALS SCIENCE, 2007, 42 (13) : 4738 - 4744
  • [35] Fabrication of metallic nanowire arrays by electrodeposition into nanoporous alumina membranes: effect of barrier layer
    Gaurav Sharma
    Michael V. Pishko
    Craig A. Grimes
    Journal of Materials Science, 2007, 42 : 4738 - 4744
  • [36] Pervaporation with nanoporous membranes
    Podgolin, Stepan K.
    Poyarkov, Andrei A.
    Eliseev, Artem A.
    Petukhov, Dmitrii I.
    Loimer, Thomas
    Eliseev, Andrei A.
    DESALINATION, 2025, 598
  • [37] Fabrication of highly ordered nanoporous alumina membranes: Probing microstructures by SAXS, FESEM and AFM
    Syed, R.
    Sen, D.
    Krishna, K. V. Mani
    Ghosh, S. K.
    MICROPOROUS AND MESOPOROUS MATERIALS, 2018, 264 : 13 - 21
  • [38] Nanoconfined ion and water transport through nanoporous atomically thin membranes: Fabrication and mechanism
    Zhang, Shengping
    Jiang, Jiaolai
    Deng, Hui
    CELL REPORTS PHYSICAL SCIENCE, 2025, 6 (03):
  • [39] Fabrication of nanoporous silicon dioxide/silicon nitride membranes using etched ion track technique
    Zhang, W. M.
    Li, J.
    Cao, L. X.
    Wang, Y. G.
    Guo, W.
    Liu, K. X.
    Xue, J. M.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2008, 266 (12-13): : 3166 - 3169
  • [40] The fabrication, formation mechanisms and applications of novel nanoporous TiO2 membranes prepared by anodization
    Yang F.
    Ding H.
    Du W.
    Xie J.
    Li S.
    Yu L.
    Zhang J.
    Wang H.
    Zhang, Jun (gwen_zhang@126.com), 1600, Chinese Academy of Sciences (47): : 727 - 737
12345