Design, Simulation and Experimental Study of the Linear Magnetic Microactuator

被引：7
|
作者：
Feng, Hanlin [1 ]
Miao, Xiaodan [1 ]
Yang, Zhuoqing [2 ]
机构：
[1] Shanghai Univ Engn Sci, Coll Mech Engn, Shanghai 201620, Peoples R China
[2] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China
来源：
MICROMACHINES | 2018年 / 9卷 / 09期
关键词：
MEMS; microactuator; magnetic; ACTUATOR; MEMS;
D O I：
10.3390/mi9090454
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis.
引用
收藏
页数：10
相关论文
共 50 条
  • [1] A linear microactuator with enhanced design
    Edler, J
    Stölting, HD
    Föhse, M
    Gatzen, HH
    MICROSYSTEM TECHNOLOGIES, 2002, 7 (5-6) : 261 - 264
  • [2] Design and modeling of a linear microactuator
    Cheung, P.
    Horowitz, R.
    Howe, R.
    Proceedings of the International Precision Engineering Seminar, 1991,
  • [3] A linear microactuator with enhanced design
    J. Edler
    H.-D. Stölting
    M. Föhse
    H. H. Gatzen
    Microsystem Technologies, 2002, 7 : 261 - 264
  • [4] The design, simulation and experimental study of active magnetic bearing
    Hartavi, AE
    Ustan, O
    Tuncay, RN
    Gurleyen, F
    IEMDC 2001: IEEE INTERNATIONAL ELECTRIC MACHINES AND DRIVES CONFERENCE, 2001, : 492 - 495
  • [5] DESIGN AND CHARACTERIZATION OF A LINEAR MOTION PIEZOELECTRIC MICROACTUATOR
    WANG, ZX
    JOUANEH, MK
    DORNFELD, D
    PROCEEDINGS - 1989 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION, VOL 1-3, 1989, : 1710 - 1715
  • [6] Dynamic simulation as a design tool for a microactuator array
    Reznik, D
    Brown, S
    Canny, J
    1997 IEEE INTERNATIONAL CONFERENCE ON ROBOTICS AND AUTOMATION - PROCEEDINGS, VOLS 1-4, 1997, : 1675 - 1680
  • [7] Computational simulation of a magnetic microactuator for tissue engineering applications
    Joseph Keyes
    Michael Junkin
    Pak Kin Wong
    Jonathan P. Vande Geest
    Biomedical Microdevices, 2009, 11 : 1259 - 1267
  • [8] Computational simulation of a magnetic microactuator for tissue engineering applications
    Keyes, Joseph
    Junkin, Michael
    Wong, Pak Kin
    Geest, Jonathan P. Vande
    BIOMEDICAL MICRODEVICES, 2009, 11 (06) : 1259 - 1267
  • [9] Design of the electrostatic linear microactuator based on the inchworm motion
    Lee, SK
    Esashi, M
    MECHATRONICS, 1995, 5 (08) : 963 - 972
  • [10] Simulation design and experimental study of magnetic stimulation coil for robot pigeon
    Xu M.
    Pu X.
    Chang M.
    Song Y.
    Ma F.
    Huai R.
    Yang J.
    Chang H.
    Shao F.
    Wang H.
    Shengwu Yixue Gongchengxue Zazhi/Journal of Biomedical Engineering, 2023, 40 (01): : 141 - 148
12345