Design, Simulation and Experimental Study of the Linear Magnetic Microactuator

被引：7

作者：

Feng, Hanlin ^{[1
]}

Miao, Xiaodan ^{[1
]}

Yang, Zhuoqing ^{[2
]}

机构：

[1] Shanghai Univ Engn Sci, Coll Mech Engn, Shanghai 201620, Peoples R China

[2] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Natl Key Lab Sci & Technol Micro Nano Fabricat, Shanghai 200240, Peoples R China

来源：

MICROMACHINES | 2018年 / 9卷 / 09期

关键词：

MEMS; microactuator; magnetic; ACTUATOR; MEMS;

D O I：

10.3390/mi9090454

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis.

引用

页数：10

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