Method for forming backscattered electron images in the scanning electron microscope

被引：0
|
作者：
Wells, OC [1 ]
Murray, CE
Gignac, LM
Frye, A
Bruley, J
机构：
[1] IBM Corp, Div Res, Yorktown Hts, NY 10598 USA
[2] IBM Corp, Microelect Div, Hopewell Jct, NY 12533 USA
来源：
SCANNING | 2005年 / 27卷 / 02期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：85 / 86
页数：2
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