Method for forming backscattered electron images in the scanning electron microscope

被引：0

作者：

Wells, OC ^{[1
]}

Murray, CE

Gignac, LM

Frye, A

Bruley, J

机构：

[1] IBM Corp, Div Res, Yorktown Hts, NY 10598 USA

[2] IBM Corp, Microelect Div, Hopewell Jct, NY 12533 USA

来源：

SCANNING | 2005年 / 27卷 / 02期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：85 / 86

页数：2

共 50 条

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