Amorphous chalcogenide layers and nanocomposites for direct surface patterning

被引:4
|
作者
Molnar, Sandor [1 ]
Bohdan, Roland [1 ]
Csarnovics, Istvan [1 ]
Burunkova, Iuliia [2 ]
Kokenyesi, Sandor [1 ]
机构
[1] Univ Debrecen, Inst Phys, H-4026 Debrecen, Hungary
[2] Univ ITMO, St Petersburg 197101, Russia
来源
关键词
chalcogenide glasses; optical-; electron-; ion-beam recording; optical relief; surface patterning; RELIEF;
D O I
10.1117/12.2076470
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Homogeneous, 200 - 3000 nm thick layers of chalcogenide glasses, 1 - 2 mm thick plane-parallel plates as well as nanocomposite structures, containing gold nanoparticles have been produced and used for in situ surface optical and geometrical relief fabrication by optical- or electron-, ion-beam recording. Investigations were focused on the formation of giant (height modulation from nanometers up to micrometers) geometrical reliefs and elements (dots, lines and diffractive elements) applicable in the 0.5 - 10 micrometer spectral range. Recording parameters were compared with available data on acrylic polymer nanocomposites. The mechanism of the recording processes, which include thermal, electron and mass-transport components were explained and the selection of the materials from As(Ge)-S(Se) binary systems with best recording parameters was done.
引用
收藏
页数:10
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