Amorphous chalcogenide layers and nanocomposites for direct surface patterning

被引:4
|
作者
Molnar, Sandor [1 ]
Bohdan, Roland [1 ]
Csarnovics, Istvan [1 ]
Burunkova, Iuliia [2 ]
Kokenyesi, Sandor [1 ]
机构
[1] Univ Debrecen, Inst Phys, H-4026 Debrecen, Hungary
[2] Univ ITMO, St Petersburg 197101, Russia
来源
关键词
chalcogenide glasses; optical-; electron-; ion-beam recording; optical relief; surface patterning; RELIEF;
D O I
10.1117/12.2076470
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Homogeneous, 200 - 3000 nm thick layers of chalcogenide glasses, 1 - 2 mm thick plane-parallel plates as well as nanocomposite structures, containing gold nanoparticles have been produced and used for in situ surface optical and geometrical relief fabrication by optical- or electron-, ion-beam recording. Investigations were focused on the formation of giant (height modulation from nanometers up to micrometers) geometrical reliefs and elements (dots, lines and diffractive elements) applicable in the 0.5 - 10 micrometer spectral range. Recording parameters were compared with available data on acrylic polymer nanocomposites. The mechanism of the recording processes, which include thermal, electron and mass-transport components were explained and the selection of the materials from As(Ge)-S(Se) binary systems with best recording parameters was done.
引用
收藏
页数:10
相关论文
共 50 条
  • [41] Comparison of photo- proton- and deuteron induced effects in amorphous chalcogenide layers
    Kökényesi, S
    Csikai, J
    Raics, P
    Szabo, I
    Szegedi, S
    Vitez, A
    XIIITH INTERNATIONAL SYMPOSIUM ON NON-OXIDE GLASSES AND NEW OPTICAL GLASSES PTS 1 AND 2, 2002, : 356 - 358
  • [42] Surface Plasmon Resonance Chemical Sensors Based on Amorphous Chalcogenide Waveguides
    Baschir, Laurentiu
    Popescu, Aurelian A.
    Savastru, Dan
    Miclos, Sorin
    MACROMOLECULAR SYMPOSIA, 2020, 389 (01)
  • [43] Direct surface patterning induced by interfering laser beams
    Mücklich, F
    Daniel, C
    Lasagni, A
    Yu, F
    NONTRADITIONAL APPROACHES TO PATTERNING, 2004, : 169 - 174
  • [44] Patterning Refractive Index on the Surface of a Chip by Direct Nanoimprinting
    Perez, Julius C.
    Talukdar, Tahmid H.
    Ryckman, Judson D.
    2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2020,
  • [45] Direct patterning of quantum dots on structured PDMS surface
    Bodas, Dhananjay
    Khan-Malek, Chantal
    SENSORS AND ACTUATORS B-CHEMICAL, 2007, 128 (01): : 168 - 172
  • [46] Chalcogenide Glass Photoresists for Grayscale Patterning
    Dwivedi, Prabhat K.
    Sharma, Satinder K.
    Rammohan, Amritha
    Sharma, Ashutosh
    SOLID STATE PHYSICS: PROCEEDINGS OF THE 55TH DAE SOLID STATE PHYSICS SYMPOSIUM 2010, PTS A AND B, 2011, 1349 : 555 - 556
  • [47] Photoinduced structural changes in near-surface layers of chalcogenide semiconductors
    Manika, I
    Teteris, J
    OPTICAL ORGANIC AND SEMICONDUCTOR INORGANIC MATERIALS, 1997, 2968 : 265 - 269
  • [48] Selenopentathionate as precursor for the formation of conductive copper chalcogenide layers on the surface of polyamide
    Petrasauskiene, N.
    Janickis, V.
    PROCEEDINGS OF BALTIC POLYMER SYMPOSIUM 2007, 2007, : 237 - 242
  • [49] Enhanced surface patterning of chalcogenide glass via imprinting process using a buffer layer
    Jin, Byeong Kyou
    Choi, Duk-Yong
    Chung, Woon Jin
    Choi, Yong Gyu
    APPLIED SURFACE SCIENCE, 2017, 415 : 132 - 136
  • [50] MAPLE direct write (DW) patterning of bio-active ceramic nanocomposites
    Doraiswamy, A
    Patz, TM
    Narayan, RJ
    Harris, L
    Auyeung, R
    Modi, R
    Chrisey, DB
    Nanoscale Materials Science in Biology and Medicine, 2005, 845 : 345 - 350