Impedance spectroscopic study of Si/HF-electrolyte system during Si dissolution

被引：5
|
作者：
Patel, BK [1 ]
Sahu, SN [1 ]
机构：
[1] Inst Phys, Bhubaneswar 751005, Orissa, India
来源：
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2000年 / 71卷 / 06期
关键词：
D O I：
10.1007/s003390000506
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Porous silicon (PS) has been synthesized by anodic etching in I-IF and ethanol electrolyte. The in situ current-voltage characteristic clearly identify the pore formation, transition and electropolishing regimes. The experimentally observed impedance and phase as a function of frequency (Bode plots) reasonably agree with theoretically simulated Bode plots drawn by considering the equivalent circuit for PS/electrolyte.
引用
收藏
页码：695 / 700
页数：6
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