A practical sputter equipment simulation system for aluminum including surface diffusion model

被引：0
|
作者：
Yamada, H [1 ]
Ohta, T [1 ]
Kaneko, H [1 ]
Yamada, Y [1 ]
机构：
[1] NEC CORP LTD,ULSI DEVICE DEV LABS,SAGAMIHARA,KANAGAWA 229,JAPAN
来源：
SISPAD '96 - 1996 INTERNATIONAL CONFERENCE ON SIMULATION OF SEMICONDUCTOR PROCESSES AND DEVICES | 1996年
关键词：
D O I：
10.1109/SISPAD.1996.865280
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：77 / 78
页数：2
相关论文
共 50 条
  • [41] Analysis of technology diffusion in agricultural industry cluster based on system dynamics and simulation model
    Zheng, Chun-Hua
    Huang, He-Liang
    JOURNAL OF DISCRETE MATHEMATICAL SCIENCES & CRYPTOGRAPHY, 2018, 21 (06): : 1211 - 1214
  • [42] Parabolic trough photovoltaic thermoelectric hybrid system: Simulation model, parametric analysis, and practical recommendations
    Herez A.
    Jaber H.
    Hage H.E.
    Lemenand T.
    Chahine K.
    Ramadan M.
    Khaled M.
    International Journal of Thermofluids, 2023, 17
  • [43] PRACTICAL ISSUES IN DEVELOPING A SMART SURFACE IRRIGATION SYSTEM WITH REAL-TIME SIMULATION OF FURROW ADVANCE
    Shahidian, S.
    Serralheiro, R. P.
    Serrano, J. M.
    IRRIGATION AND DRAINAGE, 2013, 62 (01) : 25 - 36
  • [44] A model system of pollutant accumulation on transmission and transformation equipment related to the atmospheric diffusion in urban and typical industrial areas
    Su, ZY
    Zhao, GG
    Liu, SM
    Zhu, GF
    Lin, CG
    POWERCON '98: 1998 INTERNATIONAL CONFERENCE ON POWER SYSTEM TECHNOLOGY - PROCEEDINGS, VOLS 1 AND 2, 1998, : 543 - 546
  • [45] Mathematical model and numerical simulation of aluminum casting and solidification in magnetic fields with allowance for free surface dynamics
    Minakov, A. V.
    Pervukhin, M. V.
    Platonov, D. V.
    Khatsayuk, M. Yu.
    COMPUTATIONAL MATHEMATICS AND MATHEMATICAL PHYSICS, 2015, 55 (12) : 2066 - 2079
  • [46] Mathematical model and numerical simulation of aluminum casting and solidification in magnetic fields with allowance for free surface dynamics
    A. V. Minakov
    M. V. Pervukhin
    D. V. Platonov
    M. Yu. Khatsayuk
    Computational Mathematics and Mathematical Physics, 2015, 55 : 2066 - 2079
  • [47] Numerical simulation of a thermal Ice Protection System including state-of-the-art liquid film model
    Gutierrez, Barbara Arizmendi
    Noce, Alberto Della
    Gallia, Mariachiara
    Bellosta, Tommaso
    Guardone, Alberto
    JOURNAL OF COMPUTATIONAL AND APPLIED MATHEMATICS, 2021, 391
  • [48] Simulation and Comparison of Transient Stability of Power System including DFIGs Wind Farm Based on Detailed Model
    Lin, Li
    Hou, Hongjing
    Li, Wenxia
    Jing, Sheng
    2009 INTERNATIONAL CONFERENCE ON SUSTAINABLE POWER GENERATION AND SUPPLY, VOLS 1-4, 2009, : 1459 - +
  • [49] DIFFUSION INTERACTION MODEL IN AL-FE2O3 SYSTEM INCLUDING THE FORMATION OF INTERMETALLIC PHASES
    Anisimova, Mariia A.
    Knyazeva, Anna G.
    INTERFACIAL PHENOMENA AND HEAT TRANSFER, 2024, 12 (01) : 75 - 88
  • [50] Simulation and Model Validation of the Surface Cooling System for Improving the Power of a Photovoltaic Module
    Kim, Dong-Jun
    Kim, Dae Hyun
    Bhattarai, Sujala
    Oh, Jae-Heun
    JOURNAL OF SOLAR ENERGY ENGINEERING-TRANSACTIONS OF THE ASME, 2011, 133 (04):
12345