Fabrication and Optical Characterization of Ultra-Thin Anodic Aluminum Oxide Nanoporous Templates

被引：0
|
作者：
Hsiao, Kuan-Yu [1 ]
Ho, Wen-Jeng [1 ]
Cheng, Po-Yueh [1 ]
Yeh, Chien-Wu [1 ]
Sue, Ruei-Siang [1 ]
Shen, Yu-Tang [1 ]
Hu, Chia-Hua [1 ]
Deng, Yu-Jie [1 ]
机构：
[1] Natl Taipei Univ Technol, Dept Electroopt Engn, 1,Sec 3,Zhongxiao E Rd, Taipei 10608, Taiwan
来源：
2015 International Symposium on Next-Generation Electronics (ISNE) | 2015年
关键词：
Anodic aluminum oxide (AAO); anodizing; pore-widening;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.
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页数：3
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