Fabrication and Optical Characterization of Ultra-Thin Anodic Aluminum Oxide Nanoporous Templates

被引：0

作者：

Hsiao, Kuan-Yu ^{[1
]}

Ho, Wen-Jeng ^{[1
]}

Cheng, Po-Yueh ^{[1
]}

Yeh, Chien-Wu ^{[1
]}

Sue, Ruei-Siang ^{[1
]}

Shen, Yu-Tang ^{[1
]}

Hu, Chia-Hua ^{[1
]}

Deng, Yu-Jie ^{[1
]}

机构：

[1] Natl Taipei Univ Technol, Dept Electroopt Engn, 1,Sec 3,Zhongxiao E Rd, Taipei 10608, Taiwan

来源：

2015 International Symposium on Next-Generation Electronics (ISNE) | 2015年

关键词：

Anodic aluminum oxide (AAO); anodizing; pore-widening;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this study, the fabrication of thin porous anodic aluminum oxide (AAO) templates with controllable thickness of 400-1300 nm is demonstrated. One-step anodizing method is used to generate AAO template with hexagonal porous distributed profile. The pore diameter pore-widening and AAO barrier layer thinned down are investigated. The morphologies and pore structures of the fabricated AAO templates are characterized using FE-SEM images and the transmittance and reflective spectra.

引用

页数：3

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