Detection & Diagnostics in Today's Advanced Technology Nodes

被引:0
|
作者
Zorian, Yervant [1 ]
机构
[1] Synopsys, Sunnyvale, CA 94085 USA
来源
PROCEEDINGS OF THE 2014 IEEE 17TH INTERNATIONAL SYMPOSIUM ON DESIGN AND DIAGNOSTICS OF ELECTRONIC CIRCUITS & SYSTEMS (DDECS) | 2014年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:9 / 9
页数:1
相关论文
共 50 条
  • [41] Physical Verification at Advanced Technology Nodes and the Road Ahead
    Rey, Juan C.
    PROCEEDINGS OF THE 2020 INTERNATIONAL SYMPOSIUM ON PHYSICAL DESIGN (ISPD'20), 2020, : 143 - 143
  • [42] Performance predictions of interconnect networks for advanced technology nodes
    Gallitre, M.
    Farcy, A.
    Blampey, B.
    Bermond, C.
    Flechet, B.
    Ancey, P.
    MICROELECTRONIC ENGINEERING, 2010, 87 (03) : 321 - 323
  • [43] Patterned Wafer Defect Inspection at Advanced Technology Nodes
    Liu Jiamin
    Zhao Hang
    Wu Qizhe
    Feng Xianrui
    Zhao Xiangyu
    Zhang Zhenyang
    Zhang Chumiao
    Huang Tao
    Zhu Jinlong
    Liu Shiyuan
    LASER & OPTOELECTRONICS PROGRESS, 2023, 60 (03)
  • [44] Integration of a new alignment sensor for advanced technology nodes
    Hinnen, Paul
    Depre, Jerome
    Tanaka, Shinichi
    Lim, Ser-Yong
    Brioso, Omar
    Shahrjerdy, Mir
    Ishigo, Kazutaka
    Kono, Takuya
    Higashiki, Tatsuhiko
    OPTICAL MICROLITHOGRAPHY XX, PTS 1-3, 2007, 6520
  • [45] X-Ray Metrology for Advanced Technology Nodes
    Vigliante, A.
    Lin, W. J.
    CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE 2013 (CSTIC 2013), 2013, 52 (01): : 865 - 871
  • [46] Forecasting Tomorrow's Technology Today
    McCormick, Douglas
    IEEE SPECTRUM, 2015, 52 (02) : 7 - 7
  • [47] Signalling technology for today's railways
    Glover, Mark
    COMPUTING AND CONTROL ENGINEERING, 2007, 18 (01): : 34 - 37
  • [48] Crossed aphasia and today's technology
    Dräger, B
    Knecht, S
    EUROPEAN JOURNAL OF NEUROLOGY, 2002, 9 (06) : 700 - 701
  • [49] Tomorrow's Technology is a Reality Today
    Calloway, Bond
    CHEMICAL ENGINEERING PROGRESS, 2016, 112 (07) : 32 - 32
  • [50] Marcuse's critique of technology today
    Feenberg, Andrew
    PHILOSOPHY & SOCIAL CRITICISM, 2023, 49 (06) : 672 - 685