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- [21] The specification of the 45 nm node Photomask repair processPHOTOMASK TECHNOLOGY 2006, PTS 1 AND 2, 2006, 6349Sung, Moon Gyu论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South KoreaHuh, Sungmin论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South KoreaCha, Byung Cheol论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South KoreaChoi, Sungwoon论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South KoreaHan, Woosung论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South Korea Samsung Elect Co Ltd, Photomask Team, Hwasung City 445701, Gyeonggi Do, South Korea
- [22] Hybrid low-k/Cu dual damascene process for 45-32 nm technology node using self-assembled porous-silica ultra low-k filmsPROCEEDINGS OF THE IEEE 2005 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2005, : 48 - 50Chikaki, S论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanShimoyama, M论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanYagi, R论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanYoshino, T论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanOno, T论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanIshikawa, A论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanFujii, N论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanHata, N论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanNakayama, T论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanKohmura, K论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanTanaka, H论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanGoto, T论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanKawahara, J论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanSonoda, Y论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanMatsuo, H论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanSeino, Y论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanTakada, S论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanKunimi, N论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanUchida, Y论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanHishiya, S论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanShishida, Y论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanKinoshita, K论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, JapanKikkawa, T论文数: 0 引用数: 0 h-index: 0机构: MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan MIRAI, ASET, Tsukuba, Ibaraki 3058569, Japan
- [23] CMP process development for Cobalt liner integration at the 28-nm-node2014 INTERNATIONAL CONFERENCE ON PLANARIZATION/CMP TECHNOLOGY (ICPT), 2014, : 62 - 62Koch, Johannes论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyBott, Sascha论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyWislicenus, Marcus论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyKrause, Robert论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyGerlich, Lukas论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyUhlig, Benjamin论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyLiske, Romy论文数: 0 引用数: 0 h-index: 0机构: Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyVasilev, Boris论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Module One LLC Co, D-01109 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, GermanyPreusse, Axel论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Module One LLC Co, D-01109 Dresden, Germany Fraunhofer IPMS CNT, Konigsbrucker Str 178, D-01099 Dresden, Germany
- [24] Highly manufacturable Cu/Low-k dual damascene process integration for 65nm technology nodePROCEEDINGS OF THE IEEE 2004 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2004, : 57 - 59Lee, KW论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaShin, HJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaHwang, JW论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaNam, SW论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaMoon, YJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaWee, YJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaKim, IG论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaPark, KJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaKim, JH论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaLee, SJ论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaPark, KK论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaKang, HK论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South KoreaSuh, KP论文数: 0 引用数: 0 h-index: 0机构: Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea Samsung Elect Co Ltd, Adv Proc Dev Team, Youngin City 449711, Gyunggi Do, South Korea
- [25] Investigation ULK (k=2.5) damage by direct CMP process for 45 nm technology nodeADVANCED METALLIZATION CONFERENCE 2007 (AMC 2007), 2008, 23 : 115 - 121Gall, Samuel论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, France CEA DRT LETI, GRE Minatec, F-38054 Grenoble, FranceEuvrard, Catherine论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, France CEA DRT LETI, GRE Minatec, F-38054 Grenoble, FranceShhun, Sonarith论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, FranceMaitrejean, Sylvain论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, France CEA DRT LETI, GRE Minatec, F-38054 Grenoble, FranceAssous, Myriam论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, France CEA DRT LETI, GRE Minatec, F-38054 Grenoble, FranceHaumesser, Paul-Henri论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, France CEA DRT LETI, GRE Minatec, F-38054 Grenoble, FranceRivoire, Maurice论文数: 0 引用数: 0 h-index: 0机构: CEA DRT LETI, GRE Minatec, F-38054 Grenoble, France
- [26] RET application in 45nm node and 32nm node contact hole dry ArF lithography process developmentOPTICAL MICROLITHOGRAPHY XX, PTS 1-3, 2007, 6520Miao, Xiangqun论文数: 0 引用数: 0 h-index: 0机构: Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USAXu, Xumou论文数: 0 引用数: 0 h-index: 0机构: Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USAChen, Yongmei论文数: 0 引用数: 0 h-index: 0机构: Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USAOrdonio, Chris论文数: 0 引用数: 0 h-index: 0机构: Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USABencher, Chris论文数: 0 引用数: 0 h-index: 0机构: Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USANgai, Chris论文数: 0 引用数: 0 h-index: 0机构: Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA Appl Mat Inc, 3225 Oakmead Village Dr,MS 1220,POB 58039, Santa Clara, CA 95054 USA
- [27] 45-nm node NiSiFUSI on nitrided oxide bulk CMOS fabricated by a novel integration processIEEE INTERNATIONAL ELECTRON DEVICES MEETING 2005, TECHNICAL DIGEST, 2005, : 231 - 234Yu, S论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USALu, JP论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAMehrad, F论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USABu, H论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USASbanware, A论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USARamin, A论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAPas, M论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAVisokay, MR论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAVitale, S论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAYang, SH论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAJiang, P论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAHall, L论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAMontgomery, C论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAObeng, Y论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USABowen, C论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAHong, H论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USATran, J论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAChapman, R论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USABushman, S论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAMachala, C论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USABlatchford, J论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAKraft, R论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAColombo, L论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAJohnson, S论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USAMcKee, B论文数: 0 引用数: 0 h-index: 0机构: Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA Texas Instruments Inc, Silicon Technol Dev, Dallas, TX 75243 USA
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引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAMcLaughlin, P.论文数: 0 引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAMcMahon, J.论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, Technol Res Grp, 257 Fuller Rd, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAMignot, Y.论文数: 0 引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAMont, F.论文数: 0 引用数: 0 h-index: 0机构: GLOBALFOUNDRIES Inc, Technol Res Grp, 257 Fuller Rd, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USAMotoyama, K.论文数: 0 引用数: 0 h-index: 0机构: IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USA IBM Res, 257 Fuller Rd,NFE Suite 3100, Albany, NY 12203 USANguyen, S.论文数: 0 引用数: 0 h-index: 0机构: IBM 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