Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

被引：0
|
作者：
Eliza, S. A. [1 ]
Islam, S. K. [1 ]
Rahman, T. [1 ]
Vijayaraghavan, R. [1 ]
Grundman, T. [1 ]
Blalock, B. [1 ]
Randolph, S. J. [2 ]
Baylor, L. R. [2 ]
Bigelow, T. S. [2 ]
Gardner, W. L. [2 ]
Ericson, M. N. [2 ]
Moore, J. A. [2 ]
机构：
[1] Univ Tennessee, Dept Elect Engn & Comp Sci, Knoxville, TN 37996 USA
[2] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA
来源：
2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2 | 2007年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：385 / +
页数：2
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