Digitally addressable vertically aligned carbon nanofibers for implementation of massively parallel maskless lithography

被引：0

作者：

Eliza, S. A. ^{[1
]}

Islam, S. K. ^{[1
]}

Rahman, T. ^{[1
]}

Vijayaraghavan, R. ^{[1
]}

Grundman, T. ^{[1
]}

Blalock, B. ^{[1
]}

Randolph, S. J. ^{[2
]}

Baylor, L. R. ^{[2
]}

Bigelow, T. S. ^{[2
]}

Gardner, W. L. ^{[2
]}

Ericson, M. N. ^{[2
]}

Moore, J. A. ^{[2
]}

机构：

[1] Univ Tennessee, Dept Elect Engn & Comp Sci, Knoxville, TN 37996 USA

[2] Oak Ridge Natl Lab, Oak Ridge, TN 37831 USA

来源：

2007 INTERNATIONAL SEMICONDUCTOR DEVICE RESEARCH SYMPOSIUM, VOLS 1 AND 2 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：385 / +

页数：2

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