Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

被引：29
|
作者：
Tsarfati, T. [1 ]
van de Kruijs, R. W. E. [1 ]
Zoethout, E. [1 ]
Louis, E. [1 ]
Bijkerk, F. [1 ,2 ]
机构：
[1] FOM Inst Plasma Phys Rijnhuizen, Nieuwegein, Netherlands
[2] Univ Twente, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands
来源：
THIN SOLID FILMS | 2010年 / 518卷 / 24期
关键词：
Multilayer; Lithography; X-FEL; GIXR; TEM; XPS; STRUCTURAL PHASE-STABILITY; DEPTH-RESOLUTION; ENHANCEMENT; GENERATION; MIRRORS; GROWTH;
D O I：
10.1016/j.tsf.2010.04.088
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Chemical diffusion and interlayer formation in thin layers and at interfaces is of increasing influence in nanoscopic devices such as nano-electronics, magneto-optical storage and multilayer X-ray optics. We show that with the nitridation of reactive B4C/La interfaces, both the chemical and optical contrast can be greatly enhanced. Although interaction and diffusion of N-2 from the substrate towards the adlayer does occur, this surfactant mediated growth contributes to chemical and optical interface properties that enable major reflectivity improvements of multilayer optics for 6.7<lambda<7.0 nm. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：7249 / 7252
页数：4
相关论文
共 50 条
  • [31] Determination of the density of ultrathin La films in La/B4C layered structures using X-ray standing waves
    Makhotkin, I. A.
    Louis, E.
    van de Kruijs, R. W. E.
    Yakshin, A. E.
    Zoethout, E.
    Seregin, A. Yu.
    Tereschenko, E. Yu.
    Yakunin, S. N.
    Bijkerk, F.
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2011, 208 (11): : 2597 - 2600
  • [32] X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers
    F. Choueikani
    F. Bridou
    B. Lagarde
    E. Meltchakov
    F. Polack
    P. Mercere
    F. Delmotte
    Applied Physics A, 2013, 111 : 191 - 198
  • [33] X-ray properties and interface study of B4C/Mo and B4C/Mo2C periodic multilayers
    Choueikani, F.
    Bridou, F.
    Lagarde, B.
    Meltchakov, E.
    Polack, F.
    Mercere, P.
    Delmotte, F.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2013, 111 (01): : 191 - 198
  • [34] X-ray diffraction study of B4C under high pressure
    Fujii, T.
    Mori, Y.
    Hyodo, H.
    Kimura, K.
    INTERNATIONAL CONFERENCE ON HIGH PRESSURE SCIENCE AND TECHNOLOGY, JOINT AIRAPT-22 AND HPCJ-50, 2010, 215
  • [35] Interaction of ultrashort x-ray pulses with B4C, SiC, and Si
    Bergh, M.
    Timneanu, N.
    Hau-Riege, S. P.
    Scott, H. A.
    PHYSICAL REVIEW E, 2008, 77 (02):
  • [36] Evaluation of microstructure and residual stress in W/B4C multilayer optics
    Majhi, A.
    Dilliwar, M.
    Pradhan, P. C.
    Jena, S.
    Nayak, M.
    Singh, M. N.
    Udupa, D. V.
    Sahoo, N. K.
    JOURNAL OF APPLIED PHYSICS, 2018, 124 (11)
  • [37] La/B4C multilayer mirrors with an additional wavelength suppression
    Naujok, Philipp
    Yulin, Sergiy
    Bianco, Anna
    Mahne, Nicola
    Kaiser, Norbert
    Tuennermann, Andreas
    OPTICS EXPRESS, 2015, 23 (04): : 4289 - 4295
  • [38] Development of Pt/C multilayer supermirrors for hard X-ray optics
    Yamashita, K
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2004, 529 (1-3): : 59 - 62
  • [39] Hard X-ray multilayer mirror round-robin on the wavefront preservation capabilities of W/B4C coatings
    Rack, A.
    Assoufid, L.
    Lee, W. -K.
    Shi, B.
    Liu, C.
    Morawe, Ch.
    Kluender, R.
    Conley, R.
    Bouet, N.
    RADIATION PHYSICS AND CHEMISTRY, 2012, 81 (11) : 1696 - 1702
  • [40] Multilayer X-ray Mirrors Based on W/B4C with Ultrashort (d=0.7-1.5 nm) Periods
    Vainer, Yu. A.
    Kluenkov, E. B.
    Pestov, A. E.
    Prokhorov, K. A.
    Salashchenko, N. N.
    Fraerman, A. A.
    Chernov, V. V.
    Chkhalo, N. I.
    JOURNAL OF SURFACE INVESTIGATION, 2007, 1 (01): : 7 - 12
12345