A Zinc Dioxide -on- Silicon MEMS Resonator for Narrowband Filtering

被引：0
|
作者：
Ossama, Mortada [1 ]
Pierre, Blondy [1 ]
Aurelian, Crunteanu [1 ]
Matthieu, Chatras [1 ]
Orlianges, Jean-Christophe [2 ]
机构：
[1] Univ Limoges, CNRS, Micro & Nanotechnol Optoelect & Microwave Compone, XLIM UMR 7252, F-87060 Limoges, France
[2] Univ Limoges, CNRS, SPCTS UMR 7513, F-87068 Limoges, France
来源：
2014 21ST IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS AND SYSTEMS (ICECS) | 2014年
关键词：
Microresonator; zinc dioxide; piezoelectric;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a thin-film piezoelectric-onsubstrate (TPoS) micro-resonator with a resonant frequency around 770MHz. This high frequency operation has been enabled through reducing inter-electrode gap. After optimization of geometrical design and fabrication process, resonators was measured showing an electromechanical coupling coefficient k(t)(2) of 2.2%, a high quality factor Q(m) of 1460 and a low motional resistance (R-m approximate to 21 Omega). Experimental data have shown good agreement with theoretical computations.
引用
收藏
页码：586 / 589
页数：4
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