Research on hybrid device of Si microlens arrays with long focus and IR detector arrays

被引：4
|
作者：
Chen, SH [1 ]
Yi, XJ [1 ]
He, M [1 ]
Zhang, XY [1 ]
机构：
[1] Huazhong Univ Sci & Technol, State Key Lab Laser Technol, Wuhan 430074, Peoples R China
来源：
2000 25TH INTERNATIONAL CONFERENCE ON INFRARED AND MILLIMETER WAVES CONFERENCE DIGEST | 2000年
关键词：
MLS array; step simulation; hybrid device;
D O I：
10.1109/ICIMW.2000.892974
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new method,named step simulation, is proposed to fabricate refractive 128 X 128 element Si microlens (MLS) arrays for hybrid integration with PtSi IR Focal Plane Arrays(FPAs). By the method, the focal length of rectangle-based multilevel Si MLS arrays is over 1 millimeter, much longer than typical focal length of MLS array fabricated by conventional binary optics Fresnel technique. Si MLS arrays and IR FPAs are coupled with infrared glue. The IR responsivity of the hybrid device is improved significantly.
引用
收藏
页码：147 / 148
页数：2
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