Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.