Fabrication and testing of microlens arrays for the IR based on chalcogenide glassy resists

被引：28
|
作者：
Eisenberg, NP
Manevich, M
Klebanov, M
Lyubin, V
Shtutina, S
机构：
[1] BEN GURION UNIV NEGEV, DEPT PHYS, IL-84105 BEER SHEVA, ISRAEL
[2] JERUSALEM COLL TECHNOL, IL-91160 JERUSALEM, ISRAEL
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1996年 / 198卷
关键词：
D O I：
10.1016/0022-3093(96)00118-4
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A new technique of microlens fabrication using inorganic chalcogenide photoresists is presented. High refractive index that is characteristic of chalcogenide photoresist films and correspondingly, the optical power of the microlenses, can be increased by means of silver photodoping of the ready-made microlens array. Unique properties of chalcogenide photoresists create new possibilities for the development of microoptical components for the IR. Microlens arrays on the base of As-S and As-Se photoresists were fabricated and tested.
引用
收藏
页码：766 / 768
页数：3
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