The study of ZnO/XY LiNbO3 layered saw devices for sensing applications

被引：0
|
作者：
Ippolito, SJ [1 ]
Kalantar-Zadeh, K [1 ]
Wlodarski, W [1 ]
Matthews, GI [1 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Engn, Sensor Technol Grp, Melbourne, Vic 3001, Australia
来源：
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a study of layered surface acoustic wave (SAW) devices based on a ZnO/XY LiNbO(3) structure is presented. A 3-dimensional finite-element (3D-FE) approach has been applied to simulate device performance. Particle displacement profiles in depth and beam steering are presented. Furthermore, electrical interaction of the device to a modeled gas interaction is investigated. A comparison with experimental results is used to illustrate the accuracy of the model.
引用
收藏
页码：539 / 542
页数：4
相关论文
共 50 条
  • [41] OBSERVATION OF BIFURCATIONS AND CHAOS IN SAW ON SUBSTRATE OF LINBO3
    ZHOU, JP
    ZHANG, SY
    WEI, RJ
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (01) : 79 - 79
  • [42] PRECISE MEASUREMENT OF SAW PROPAGATION VELOCITY ON LINBO3
    TEMMYO, J
    KOTAKA, I
    INAMURA, T
    YOSHIKAWA, S
    IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1980, 27 (04): : 218 - 219
  • [43] SUPPRESSION OF HIGHER HARMONIC GENERATIONS OF SAW IN LINBO3
    LEE, J
    SINGH, MP
    ZUCKER, J
    APPLIED PHYSICS LETTERS, 1980, 36 (11) : 896 - 898
  • [44] A ZnO nanorod based layered ZnO/64° YX LiNbO3SAW hydrogen gas sensor
    Sadek, A. Z.
    Wlodarski, W.
    Li, Yx
    Yu, W.
    Li, X.
    Yu, X.
    Kalantar-Zadeh, K.
    THIN SOLID FILMS, 2007, 515 (24) : 8705 - 8708
  • [45] Improve the response frequency of epitaxial LiNbO3 film SAW devices by substrate strain gradient
    Yang, Rongbang
    Mao, Shiyu
    Wei, Haoming
    Yang, Tengzhou
    Cao, Bingqiang
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2024, 35 (16)
  • [46] Comparative study on optical properties of Yb3+ doped LiNbO3: MgO and LiNbO3:ZnO laser crystals
    Ning, Kaijie
    Li, Baizhong
    Zhang, Qingli
    Hang, Yin
    Shi, Zhenhua
    OPTICS COMMUNICATIONS, 2015, 349 : 94 - 97
  • [47] Calculation and optical measurement of SAW diffraction pattern of slanted finger SAW filters on YZ LiNbO3 and 128YX LiNbO3
    Yatsuda, H
    Kamiseki, S
    Chiba, T
    2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2001, : 13 - 17
  • [48] Study on the ductile mode cutting of LiNbO3 wafer for fabrication of SAW device
    Shizuka H.
    Okuda K.
    Nunobiki M.
    Li W.
    Inaoka T.
    International Journal of Abrasive Technology, 2011, 4 (03) : 191 - 203
  • [49] Theoretical Studies on LiNbO3/Sapphire layered structure with SiO2 over layer for zero TCD SAW device applications
    Tomar, M
    Gupta, V
    Sreenivas, K
    2001 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2001, : 265 - 268
  • [50] A SAW Filter Using SiO2/LiNbO3 Layered-Structure Phononic Crystals
    Sun, Jia-Hong
    Yu, Yuan-Hai
    2016 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS), 2016, : 352 - 354
12345