The study of ZnO/XY LiNbO3 layered saw devices for sensing applications

被引：0
|
作者：
Ippolito, SJ [1 ]
Kalantar-Zadeh, K [1 ]
Wlodarski, W [1 ]
Matthews, GI [1 ]
机构：
[1] RMIT Univ, Sch Elect & Comp Engn, Sensor Technol Grp, Melbourne, Vic 3001, Australia
来源：
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper a study of layered surface acoustic wave (SAW) devices based on a ZnO/XY LiNbO(3) structure is presented. A 3-dimensional finite-element (3D-FE) approach has been applied to simulate device performance. Particle displacement profiles in depth and beam steering are presented. Furthermore, electrical interaction of the device to a modeled gas interaction is investigated. A comparison with experimental results is used to illustrate the accuracy of the model.
引用
收藏
页码：539 / 542
页数：4
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