Properties of tetrahedral amorphous carbon film by filtered cathodic arc deposition for disk overcoat

被引：15

作者：

Hyodo, H ^{[1
]}

Yamamoto, T ^{[1
]}

Toyoguchi, T ^{[1
]}

机构：

[1] Fujitsu Labs Ltd, Magnet Recording Technol Lab, Atsugi, Kanagawa 2430197, Japan

来源：

IEEE TRANSACTIONS ON MAGNETICS | 2001年 / 37卷 / 04期

关键词：

disk overcoat; filtered cathodic arc (FCA) deposition; tetrahedral amorphous carbon (ta-C) film;

D O I：

10.1109/20.950969

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Properties of an amorphous carbon film by Filtered Cathodic Arc (FCA) deposition were studied. It was found that the properties of the film hardly changed by deposition conditions and that nitrogen doping into the film was effective for controlling the film properties. The amount of the sp(3) bonding in the film was decreased with nitrogen content, thus the hardness also decreased. The adhesion of lubricant to the carbon film was improved by nitrogen doping. The films by FCA deposition have high durability and can be expected as ultra thin disk overcoat for the next generation.

引用

页码：1789 / 1791

页数：3

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