Ultrathin amorphous carbon overcoats by filtered cathodic arc deposition

被引：12
|
作者：
Yamamoto, T [1 ]
Hyodo, H
Tsuchitani, S
Kaneko, R
机构：
[1] Toshiba Co Ltd, Ome 1988710, Japan
[2] Fujitsu Ltd, Kawasaki, Kanagawa 2118588, Japan
[3] Fujitsu Labs Ltd, Atsugi, Kanagawa 2430197, Japan
[4] Wakayama Univ, Fac Syst Engn, Wakayama 6408510, Japan
来源：
IEEE TRANSACTIONS ON MAGNETICS | 2003年 / 39卷 / 05期
关键词：
corrosion resistance; durability; filtered cathodic arc deposition; overcoat; tetrahedral amorphous carbon;
D O I：
10.1109/TMAG.2003.817065
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We studied properties of 2- to 25-nm-thick tetrahedral amorphous carbon films produced by filtered cathodic arc deposition. We found that nitrogen doping was effective in controlling film properties. Both the amount of sp(3) bonding in the film and the hardness decreased with nitrogen incorporation. The adhesion of lubricant to the carbon film was improved by nitrogen doping. Tests of wear and corrosion on a nanometer scale showed the superior tribological and anticorrosion performance of tetrahedral amorphous carbon films over hydrogenated amorphous carbon films.
引用
收藏
页码：2201 / 2204
页数：4
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