Phase composition of gas sensitive thin films of tin oxide operating at near room temperature

被引：0
|
作者：
Mahdi, O. S. [1 ,2 ]
Malyar, I. V. [1 ]
Zakharevich, A. M. [1 ]
Smirnov, A. V. [1 ]
Sinev, I. V. [1 ]
Venig, S. B. [1 ]
机构：
[1] Saratov NG Chernyshevskii State Univ, Saratov 410012, Russia
[2] Al Muthanna Univ, Samawah, Iraq
来源：
TECHNICAL PHYSICS LETTERS | 2017年 / 43卷 / 07期
基金：
俄罗斯基础研究基金会;
关键词：
SNO2; SENSORS; CO;
D O I：
10.1134/S1063785017070239
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have studied the phase composition of thin polycrystalline tin oxide films deposited on silicon substrates by reactive RF magnetron sputtering. The films are sensitive to ethanol vapors at 38A degrees C. They consist of SnO2 crystallites with the average grain size of about 7 nm, covered with a nanodimensional layer of amorphous SnO phase. It was found that the volume fraction of the former phase is about 95% and that of the latter phase is about 5%. Calculations of the film texture indicate the predominant growth of SnO2 crystals along aOE (c) 110 >, aOE (c) 211 >, and aOE (c) 310 > crystal directions perpendicular to the substrate.
引用
收藏
页码：681 / 683
页数：3
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