Electrochemical micromachining of titanium through a patterned oxide film

被引：25
|
作者：
Chauvy, PF [1 ]
Madore, C [1 ]
Landolt, D [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Met Chim, Dept Mat, CH-1015 Lausanne, Switzerland
来源：
ELECTROCHEMICAL AND SOLID STATE LETTERS | 1999年 / 2卷 / 03期
关键词：
D O I：
10.1149/1.1390755
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Electrochemical micromachining of titanium through a patterned oxide film (oxyresist) has been achieved in a sulfuric acidmethanol-based electropolishing electrolyte. The patterned oxide film was formed in an aqueous 0.5 M sulfuric acid solution by selective anodic oxidation of titanium through a photoresist mask. Electrochemical dissolution through the patterned oxide film yielded well-defined grooves comparable to those obtained by etching directly through a photoresist mask. The described process eliminates the need for photoresists to be chemically stable in aggressive electropolishing electrolytes. It increases significantly the flexibility of implementation of electrochemical micromachining of valve metals. (C) 1999 The Electrochemical Society. S1099-0062(98)11-024-6 All rights reserved.
引用
收藏
页码：123 / 125
页数：3
相关论文
共 50 条
  • [21] Minimization of undercutting in electrochemical micromachining of patterned aluminum-copper films
    Cosse, J. T.
    Lopez, G. P.
    Atanassov, P.
    Bauer, T. M.
    Chaudhury, Z. A.
    Schwappach, C. D.
    Mosley, L. E.
    Brevnov, D. A.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (01) : 89 - 97
  • [22] Ultrasound aided through-mask electrochemical micromachining of micro-hole array in titanium
    Huaihai Institute of Technology, Lianyungang 222005, China
    不详
    Zhongguo Jixie Gongcheng, 2008, 22 (2670-2672+2771):
  • [23] An electrochemical study on the anodic oxygen evolution on oxide film covered titanium
    Kong, De-Sheng
    Wu, Ji-Xia
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 155 (01) : C32 - C40
  • [24] Formation of platinum-titanium oxide film electrodes and their electrochemical stability
    Malevich, DV
    Mazets, AF
    Drozdovich, VB
    Zharskii, IM
    RUSSIAN JOURNAL OF APPLIED CHEMISTRY, 1997, 70 (04) : 558 - 561
  • [25] Microstructural characterization of biomedical titanium oxide film fabricated by electrochemical method
    Oh, HJ
    Lee, JH
    Jeong, Y
    Kim, YJ
    Chi, CS
    SURFACE & COATINGS TECHNOLOGY, 2005, 198 (1-3): : 247 - 252
  • [26] Kinetics of electrochemical formation of an oxide film on a titanium-aluminum alloy
    Fishgoit, LA
    Davydov, AD
    Meshkov, LL
    RUSSIAN JOURNAL OF ELECTROCHEMISTRY, 1999, 35 (03) : 355 - 357
  • [27] Electrochemical response of ZrO2 incorporated titanium oxide film
    Lee, K. M.
    Jung, B. K.
    Ko, Y. G.
    Shin, D. H.
    MATERIALS RESEARCH INNOVATIONS, 2014, 18 : 407 - 411
  • [28] Electrochemical Fabrication of Titanium Oxide Film from an Aqueous Solution Containing Titanium Ion and Hydroxylamine
    Ishizaki, H.
    Ito, S.
    PHOTOVOLTAICS FOR THE 21ST CENTURY 7, 2011, 41 (04): : 111 - 117
  • [29] Electrochemical micromachining of mass produced fluid film bearings
    Wardle, F
    PRECISION ENGINEERING, NANOTECHNOLOGY, VOL. 2, 1999, : 80 - 83
  • [30] Review-Through-Mask Electrochemical Micromachining
    Baldhoff, T.
    Nock, V.
    Marshall, A. T.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2018, 165 (16) : E841 - E855
12345