Electrochemical micromachining of titanium through a patterned oxide film

被引：25
|
作者：
Chauvy, PF [1 ]
Madore, C [1 ]
Landolt, D [1 ]
机构：
[1] Ecole Polytech Fed Lausanne, Lab Met Chim, Dept Mat, CH-1015 Lausanne, Switzerland
来源：
ELECTROCHEMICAL AND SOLID STATE LETTERS | 1999年 / 2卷 / 03期
关键词：
D O I：
10.1149/1.1390755
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Electrochemical micromachining of titanium through a patterned oxide film (oxyresist) has been achieved in a sulfuric acidmethanol-based electropolishing electrolyte. The patterned oxide film was formed in an aqueous 0.5 M sulfuric acid solution by selective anodic oxidation of titanium through a photoresist mask. Electrochemical dissolution through the patterned oxide film yielded well-defined grooves comparable to those obtained by etching directly through a photoresist mask. The described process eliminates the need for photoresists to be chemically stable in aggressive electropolishing electrolytes. It increases significantly the flexibility of implementation of electrochemical micromachining of valve metals. (C) 1999 The Electrochemical Society. S1099-0062(98)11-024-6 All rights reserved.
引用
收藏
页码：123 / 125
页数：3
相关论文
共 50 条
  • [1] Electrochemical micromachining of titanium through a patterned oxide film
    Ecole Polytechnique Federale de, Lausanne, Lausanne, Switzerland
    Electrochem Solid State Letters, 3 (123-125):
  • [2] Electrochemical micromachining of titanium through a laser patterned oxide film
    Chauvy, PF
    Hoffmann, P
    Landolt, D
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2001, 4 (05) : C31 - C34
  • [3] Through-mask electrochemical micromachining of titanium
    Madore, C
    Piotrowski, O
    Landolt, D
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1999, 146 (07) : 2526 - 2532
  • [4] Electrochemical micromachining of titanium using laser oxide film lithography: excimer laser irradiation of anodic oxide
    Chauvy, PF
    Hoffmann, P
    Landolt, D
    APPLIED SURFACE SCIENCE, 2003, 211 (1-4) : 113 - 127
  • [5] Applications of laser lithography on oxide film to titanium micromachining
    Chauvy, PF
    Hoffmann, P
    Landolt, D
    APPLIED SURFACE SCIENCE, 2003, 208 : 165 - 170
  • [6] Micromachining of tin oxide film by electrochemical reduction process
    Matsuo, Y
    Hashimoto, K
    Sugie, Y
    Nakamura, T
    Tsunoda, J
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (09) : 3067 - 3069
  • [7] Fabrication of Different Micro Patterned Arrays by Through Mask Electrochemical Micromachining
    Mahata, S.
    Kunar, S.
    Bhattacharyya, B.
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2019, 166 (08) : F217 - F225
  • [8] New developments in through-mask electrochemical micromachining of titanium
    Kern, P.
    Veh, J.
    Michler, J.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (06) : 1168 - 1177
  • [9] On the modeling of shape evolution in through-mask electrochemical micromachining of complex patterned substrates
    Raffelstetter, P.
    Mollay, B.
    ELECTROCHIMICA ACTA, 2010, 55 (06) : 2149 - 2157
  • [10] Parametric analysis of fabrication of through micro holes on titanium by maskless electrochemical micromachining
    Sandip S. Anasane
    B. Bhattacharyya
    The International Journal of Advanced Manufacturing Technology, 2019, 105 : 4585 - 4598
12345