共 50 条
- [21] Optical Nano-Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence 2021 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2021,
- [22] Six Degree of Freedom Vibration Isolation Platform for In-Line Nano-Metrology IFAC PAPERSONLINE, 2016, 49 (21): : 149 - 156
- [23] Nano-metrology of platinum-ruthenium bimetallic catalysts and the cluster-to-crystal transformation EMAG-NANO 2005: IMAGING, ANALYSIS AND FABRICATION ON THE NANOSCALE, 2006, 26 : 207 - +
- [24] A technique for drift compensation of an area-varying capacitive displacement sensor for nano-metrology EUROSENSORS XXIV CONFERENCE, 2010, 5 : 412 - 415
- [26] Nano-metrology: The art of measuring X-ray mirrors with slope errors <100 nrad REVIEW OF SCIENTIFIC INSTRUMENTS, 2016, 87 (05):
- [28] Dual imaging unit atomic force microscope and its applications in wide-range nano-metrology 2005, Science Press, Beijing, China (26):
- [29] A nano-metrology system with a two-dimensional combined optical and X-ray interferometer and an atomic force microscope MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2009, 15 (12): : 1879 - 1884
- [30] A nonlinearity error compensation method in nano-metrology system based on developed three-longitudinal mode heterodyne interferometer International Journal of Mechatronics and Applied Mechanics, 2018, 2018 (03): : 60 - 65