Reaction of Ta(NMe2)5 with O2:: Mechanistic studies of the formation of microelectronic Ta2O5 thin films

被引：0
|
作者：
Chen, SJ
Wang, RT
Yu, XH
Qiu, H
Guzei, IA
Xue, ZL
机构：
[1] Univ Tennessee, Dept Chem, Knoxville, TN 37996 USA
[2] Univ Wisconsin, Dept Chem, Madison, WI 53706 USA
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2005年 / 229卷
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
655-INOR
引用
收藏
页码：U1063 / U1063
页数：1
相关论文
共 50 条
  • [21] Elaboration of Ta2O5 thin films using electrostatic spray deposition for microelectronic applications
    Lintanf, A.
    Mantoux, A.
    Blanquet, E.
    Djurado, E.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2007, 111 (15): : 5708 - 5714
  • [22] Leakage currents in amorphous Ta2O5 thin films
    Chiu, FC
    Wang, JJ
    Lee, JY
    Wu, SC
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (10) : 6911 - 6915
  • [23] TREATMENT OF DEFECTS IN THIN TA2O5 DIELECTRIC FILMS
    MOTOSHKIN, VV
    MUKHACHOV, VA
    MILLER, AA
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1979, (06): : 96 - 98
  • [24] Computational and Experimental Study of Ta2O5 Thin Films
    Sathasivam, Sanjayan
    Williamson, Benjamin A. D.
    Kafizas, Andreas
    Althabaiti, Shaeel A.
    Obaid, Abdullah Y.
    Basahel, Sulaiman N.
    Scanlon, David O.
    Carmalt, Claire J.
    Parkin, Ivan P.
    JOURNAL OF PHYSICAL CHEMISTRY C, 2017, 121 (01): : 202 - 210
  • [25] Low Crystallization Temperature for Ta2O5 Thin Films
    Lin, J.
    Suzuki, T.
    Matsunaga, D.
    Hieda, K.
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2003, 42 (11): : 7023 - 7024
  • [26] Optical properties of crystalline Ta2O5 thin films
    Darmasetiawan, H
    Irzaman
    Indro, MN
    Sukaryo, SG
    Hikam, M
    Bo, NP
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 2002, 193 (01): : 53 - 60
  • [27] FLAWS IN ANODIC TA2O5 FILMS
    VERMILYEA, DA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (03) : C68 - C68
  • [28] SCINTILLATION IN ANODIC TA2O5 FILMS
    ALBELLA, JM
    MONTERO, I
    MARTINEZDUART, JM
    THIN SOLID FILMS, 1979, 58 (02) : 307 - 311
  • [29] FLAWS IN ANODIC TA2O5 FILMS
    VERMILYEA, DA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (04) : 250 - 262
  • [30] FLAWS IN ANODIC TA2O5 FILMS
    HUBER, K
    VERMILYEA, DA
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (12) : 1286 - 1289
12345